STACIS IIIc

STACIS IIIc compact active vibration isolator
  • Overview +


    STACIS IIIc is a compact version of our STACIS III active piezoelectric vibration cancellation system. It offers the same outstanding vibration isolation performance at a reduced height.

    STACIS IIIc is ideal in situations where there is no, or very low, raised floor, where the height of the standard STACIS III system would make the instrument too tall.

    In a 3-isolator configuration isolator height is less than 60% of the regular STACIS III height. In systems with more than 3 isolators the height will be between 60 and 70% depending on payload setup. See specifications below for details.

  • The STACIS IIIc Advantage +


    Up to 42% reduction in isolator height, compared to the regular STACIS III system with no reduction in performance.

    Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

    The unique serial design and proprietary high-force piezoelectric technology 
    results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.

  • Performance +



    4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

  • Specifications +


    Performance Specifications
    Active degrees of freedom 6
    Active bandwidth 0.6 Hz - 150 Hz
    Passive natural frequency 18 Hz vertical and horizontal
    Effective active resonant frequency 0.5 Hz
    Isolation at 1 Hz 40% - 70%
    Isolation at ≥2 Hz ≥90%
    Settling time after a 10 lb (4.5 kg) step input (10:1 reduction) 0.3 sec
    Internal noise <0.1 nm RMS
    Operating load range per isolator Low capacity: 400-1100 lbs (181-499 kg)
    Med capacity: 900-2100 lbs (408-953 kg)
    Hi capacity: 1900-4500 lbs (862-2041 kg)
    Stiffness (1000 lb / 454 kg mass, Med capacity isolator) 40,000 lb/in. (73 x 105 N/m)
    Magnetic field emitted at maximum 4 in. (102 mm) from the isolator <0.02 μG broadband RMS
    Isolator Design, Dimensions, and Environmental and Utility Requirements
    Environmental and safety CE and RoHS compliant
    Active isolation elements Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
    Passive isolation element single stiff isotropic elastomer (no compressed air supply required)
    Vibration sensor elements downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
    Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
    Isolator dimensions* (WxDxH) 14.45 x 14.26 x 6.16 in.
    367 x 362 x 157 mm
    *Systems with ≥4 isolators may require the addition of external wedge mounts that add 1.6 in. (41 mm) to the height.
    Isolator weight 53 lbs (24 kg)
    Operating temperature 50° - 90° F
    10° - 32° C
    Storage temperature -40° - 130° F
    -40° - 55° C
    Humidity 30 - 60%
    System power requirements 100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant
    Floor displacement <480 μin. (12 μm) below 10 Hz
    Isolator count per system minimum of 3
    Options laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods
    DC-2020 Controller Specifications
    Dimensions (WxDxH) 19 x 8.5 x 1.75 in.
    483 x 216 x 45 mm
    Weight 6.3 lb (2.9 kg)
    Processor 150/75 MHz dual core
    Sampling rate 10 kHz
    Analog outputs 16 channels
    Analog inputs 16 channels
    Status light single LED
    Front panel ports 1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC
    Rear panel ports 1x serial USB 2.0
    1x Ethernet RJ-45
    1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
    User interface Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI
  • To Order +


    STACIS IIIc systems are engineered-to-order for your specific tool and floor condition. 
    Please contact our Active Products Application Engineering Team so that we may propose a suitable configuration for your application.
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