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STACIS III

STACIS III pods and controller on white bg

  • Overview +


    STACIS® III is a flexible advanced active vibration isolation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

    Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.

    STACIS III includes a new and improved digital controller, the DC-2020. With a new dual-core processor and Ethernet as well as USB serial ports on the front and rear panels, this new advanced control system provides the user with a modern and easy to use Graphical User Interface (GUI). With many hundreds of successful installations worldwide, STACIS is the ideal vibration isolation system for the most vibration-sensitive instruments. 

  • The STACIS III Advantage +


    Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

    The unique serial design and proprietary high-force piezoelectric technology 
    results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.

  • Performance +



    4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

  • Specifications +


    Performance Specifications
    Active degrees of freedom 6
    Active bandwidth 0.6 Hz - 150 Hz
    Passive natural frequency 18 Hz vertical and horizontal
    Effective active resonant frequency 0.5 Hz
    Isolation at 1 Hz 40% - 70%
    Isolation at ≥2 Hz ≥90%
    Settling time after a 10 lb (4.5 kg) step input (10:1 reduction) 0.3 sec
    Internal noise <0.1 nm RMS
    Operating load range per isolator Low capacity: 400-1100 lbs (182-500 kg)
    Med capacity: 900-2100 lbs (410-955 kg)
    Hi capacity: 1900-4500 lbs (864-2045 kg)
    Stiffness (1000 lb / 454 kg mass, Med capacity isolator) 40,000 lb/in. (73 x 105 N/m)
    Magnetic field emitted at maximum 4 in.(102 mm) from the isolator <0.02 μG broadband RMS
    Isolator Design, Dimensions, and Environmental and Utility Requirements
    Environmental and safety CE and RoHS compliant
    Active isolation elements Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
    Passive isolation element single stiff isotropic elastomer (no compressed air supply required)
    Vibration sensor elements downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
    Active feedback control loop Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
    Isolator dimensions (WxDxH) 11.75 x 12.5 x 10.8 in.
    300 x 320 x 275 mm
    Isolator weight 75 lb (34 kg)
    Operating temperature 50° - 90° F
    10° - 32° C
    Storage temperature -40° - 130° F
    -40° - 55° C
    Humidity 80% Maximum at 68 degrees F (20 degrees C), Maximum dewpoint: 18 degrees C
    System power requirements 100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant
    Floor displacement <480 μin. (12 μm) below 10 Hz
    Isolator count per system minimum of 3
    Options laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods
    DC-2020 Controller Specifications
    Dimensions (WxDxH) 19 x 8.5 x 1.75 in.
    483 x 216 x 45 mm
    Weight 6.3 lb (2.9 kg)
    Processor 150/75 MHz dual core
    Sampling rate 10 kHz
    Analog outputs 16 channels
    Analog inputs 16 channels
    Status light single LED
    Front panel ports 1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC
    Rear panel ports 1x serial USB 2.0
    1x Ethernet RJ-45
    1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
    User interface Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI

  • Application Notes +


    Impact of Vibration on Advanced Immersion Lithography

    Performance Loss in Stacked Pneumatic Isolation Systems

    Precitech Nanoform 250 Ultra combined with STACIS increases yield

    STACIS as a Microseismic Shaker

    STACIS III Quiet Island Enables High-Resolution Cryo-EM

  • Application Photos +


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  • To Order +


    STACIS® III Systems are engineered-to-order for your specific tool and floor condition. 
    Please contact our Active Products Application Engineering Team so that we may propose a suitable configuration for your application.
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