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SEM Base LP for Thermo Fisher

SEM-Base LP floor vibration cancellation for Thermo Fisher scientific tools

  • Overview +


    SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.

    SEM-Base LP on a TFS frame iso view SEM-Base LP on a TFS frame side view

    Example of how SEM-Base LP integrates with the bottom frame of the tool

  • Compatible Thermo Fisher Tool Models +


    SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

    • Apreo
    • Aquilos
    • Helios 5
    • Nova NanoSEM x50
    • Prisma
    • Quattro S
    • Scios
    • Teneo
    • Verios 5
    • Versa 3D

    If your SEM/FIB is not listed, contact TMC to check for compatibility.

  • The SEM-Base Advantage +


    Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

    Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 

    Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

  • Performance +



    1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

  • Specifications +


    Performance Specifications
    Active degrees of freedom 6
    Active bandwidth 0.6 Hz - 100 Hz
    Passive natural frequency 12 Hz nominal
    Effective active resonant frequency 0.5 Hz
    Isolation at 1 Hz 40% - 70%
    Isolation at 2 Hz 90%
    Isolation at ≥3 Hz 90-98%
    Internal noise <0.1 nm RMS
    Operating load range 900 - 2,500 lbs (408 - 1134 kg)
    Magnetic field emitted
    at maximum 4 in.(102 mm)
    from the platform    		 <0.02 μG broadband RMS
    Design, Dimensions, and Environmental and Utility Requirements
    Environmental and safety CE and RoHS compliant
    Active isolation elements High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
    Passive isolation element single stiff elastomer (no compressed air supply required)
    Vibration sensor elements Downward facing geophone type inertial sensors
    that measure floor vibration below the isolator
    and deliver voltage proportional to the velocity of vibration motion
    Active feedback control loop Floor vibration is measured, processed
    and attenuated below the spring
    supporting the isolated surface
    Dimensions (WxD) 33.3 x 34.9 in. | 846 x 887 mm
    41 x 34.9 in. | 1041 x 887 mm total with casters
    Height 5.26 in. (134 mm) nominal,
    doesn't change when SEM-Base is switched off
    Operating temperature 50° - 90° F
    10° - 32° C
    Storage temperature -40° - 130° F
    -40° - 55° C
    Humidity < 80% @ 68° F | 20° C, maximum dewpoint 18 degrees C
    System power requirements 100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant
    Floor displacement <800 μin. (20 μm) below 10 Hz
    Controller Specifications
    Processor 150/75 MHz dual core
    Sampling rate 10 kHz
    Analog outputs 16 channels
    Analog inputs 16 channels
    Status light single LED
    Front panel ports 1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC
    User interface Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI

  • Video +

    • SEM-Base LP Install Video

      SEM-Base LP Installation Under a Scanning Electron Microscope

  • To Order +


    Contact TMC. An Application Engineer will configure a system for your unique requirements and provide a quotation.
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