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SEM-Base active vibration isolation platform for electron microscopes
  • Overview +

    SEM-Base® VI is the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer. 

    SEM-Base VI uses a unique "serial architecture" in which the vibration sensors measure floor vibration, not payload vibration. This ensures that, unlike other designs, payload resonances do not inherently limit vibration isolation or cause instability. The vibration sensors are low frequency inertial velocity sensors for maximum sensitivity in the difficult to measure sub-Hz range. Combined with our unique piezo-actuator technology, SEM-Base VI achieves extremely high levels of vibration cancellation, even on already quiet floors. 

    SEM-Base VI provides, on average, 6 dB more vibration isolation than previous models. In addition, TMC's next generation controller, the DC-2020, features a new dual-core processor and provides tool owners and researchers with a very simple and easy-to-use graphical interface for fast system assessment and operational peace-of-mind. When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser with no additional software or application program to install. Alternatively, the user can interface with the controller via an on-board menu-driven Liquid Crystal Display (LCD). 

    NOTE: See SEM-Closure, a total environmental solution designed specifically to protect SEMs. It can accommodate SEM-Base and Mag-NetX®  in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.

  • The SEM-Base VI Advantage +

    Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

    Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 

    Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

  • Specifications +

    Performance Specifications
    Active degrees of freedom 6
    Active bandwidth 0.6 Hz - 100 Hz
    Passive natural frequency 12 Hz nominal
    Effective active resonant frequency 0.5 Hz
    Isolation at 1 Hz 40% - 70%
    Isolation at 2 Hz 90%
    Isolation at ≥3 Hz 90-98%
    Internal noise <0.1 nm RMS
    Operating load range Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
    High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)
    Magnetic field emitted
    at maximum 4 in.(102 mm)
    from the platform
    <0.02 μG broadband RMS
    Design, Dimensions, and Environmental and Utility Requirements
    Environmental and safety CE and RoHS compliant
    Active isolation elements Piezoelectric actuators with minimum 3300 lb. (1500 kg) capacity receive signal from a high-voltage amplifier with an output of up to 800 VDC. Vertical actuators support the isolated payload.
    Passive isolation element single stiff elastomer (no compressed air supply required)
    Vibration sensor elements downward facing geophone type inertial sensors
    that measure floor vibration below the isolator
    and deliver voltage proportional to the velocity of vibration motion
    Active feedback control loop Floor vibration is measured, processed
    and attenuated below the spring
    supporting the isolated surface
    Dimensions (WxD) 35.25 x 44.25 in.
    895 x 1124 mm
    Height 6.3 in. (160 mm) nominal,
    doesn't change when SEM-Base is switched off
    Operating temperature 50° - 90° F
    10° - 32° C
    Storage temperature -40° - 130° F
    -40° - 55° C
    Humidity < 80% @ 68° F | 20° C, Maximum dewpoint 18 degrees C
    System power requirements 100, 120, 230, 240 VAC
    50/60 Hz AC; <600 W
    CE compliant
    Floor displacement <800 μin. (20 μm) below 10 Hz
    Built-in Controller Specifications
    Processor 150/75 MHz dual core
    Sampling rate 10 kHz
    Analog outputs 16 channels
    Analog inputs 16 channels
    Status light single LED
    Front panel ports 1x serial USB 2.0
    1x serial Micro-USB
    1x Ethernet RJ-45
    2x BNC
    User interface Front panel LCD display
    Character menu on HyperTerminal
    Extended GUI for Microsoft Windows
    Embedded Ethernet GUI

  • Performance +

    1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

  • Accessories +

    Click here to view the Accessories 

  • Application Photos +

  • Application Notes +

    • SEM Imaging

      Before and After Images, Hitachi S-4800 on a SEM-Base®

    • SEM Imaging

      Before and After Images, Zeiss Auriga FIB-SEM on a SEM-Base® with Mag-NetX®

    • Case Study

      Active Piezoelectric Vibration Cancellation Enables Advanced Electron and Ion Beam Instruments in Harsh City Environments

    • Improving Diamond Turning Quality

      Minimizing surface roughness in order to eliminate diffractive color on diamond turned smart device camera lens molds

  • To Order +