Piezoelectric Active Vibration Cancellation

 

The STACIS family of active piezoelectric vibration isolation solutions
  • stacis III active piezoelectric vibration isolation system
    STACIS III

    Cancels vibrations in real time by continuously measuring floor activity, then expanding and contracting sophisticated piezoelectric actuators to filter out floor motion.

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  • stacis III active piezoelectric vibration isolation system
    STACIS IIIc

    Compact low-profile version of STACIS III. Ideal in situations where there is no, or very low, raised floor.

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  • Quiet Island CleanRoom Semiconductor fab isometric
    Quiet Island

    An efficient solution to building vibration affecting large instruments. Replaces a section of a raised floor area with an “Island” anchored to the sub-floor below.

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  • Floor platform with active piezoelectric vibration isolators
    Floor Platform

    TMC’s STACIS Floor Platforms combine our Stainless Steel Platforms with a unique “lifthood” design, our isolators “cradle” the platform allowing the tool to be lifted a minimal distance above the floor. The platform may be custom designed to match the tool footprint or any desired shape.

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  • SEM-Base - the best floor vibration isolation for most SEMs and TEMs
    SEM-Base VI

    An active vibration isolation floor platform designed to support most commercial SEM and similar SEM-type instruments on any lab floor. The ideal solution to fulfil the microscope’s vibration criteria.

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  • Hybrid optical table vibration isolation system
    LaserTable-Base

    Hybrid air and piezoelectric vibration isolation optical table support system for the ultimate vibration isolation performance.

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  • Vibration cancellation system for moving stage semiconductor tools
    Stage-Base

    Specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages.

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