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PEPS® II Active Air Leveling System

  • Overview +

    PEPS® II improves and builds upon TMC’s patented PEPS® (Precision Electronic Positioning System). With the addition of a new digital controller, PEPS® II is easier to use, offers more features, and has an improved user interface. PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Such systems normally incorporate mechanical height valves and a mechanical height sensing linkage. Its applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability. 

    U.S. Patent No. 5,832,806

  • Features +

    • Digital control, user-friendly LCD interface
    • Non-contacting electro-pneumatic height control for Gimbal Piston™, CSP®, and MaxDamp® vibration isolation systems
    • Z-axis position repeatability: 10 microns
    • Improved vibration isolation due to the elimination of the lever contact of conventional mechanical height control systems
    • Pneumatic feedforward function minimizes Z-axis reaction to X-Y stage motion
    • May be tuned to rapidly settle motion induced by X-Y stages
    • Optional “VX” feature incorporates inertial sensors for active damping of vertical isolator resonance
    • “Soft-dock” compatible. Allows for wafer loading/unloading without kinematic mounting
    • Proportional electronic valves. No pulse noise introduced by “on-off” or conventional electronic valves
    • Plumbed exhaust line for clean disposal of waste air
    • Logic dock control and status
  • Specifications +

    Physical Dimensions
    PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D
    PEPS® II Controller: approximately 3.0 lb (1.2 kg)
    (refer to EN 61010-1: 1993,
    EN 61010-1/A2: 1995)
    For indoor use only, up to an elevation of 2,000 m (6560 ft.)
    Maximum allowable temperature range: 5° C to 35° C
    Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C
    Tolerance in main supply voltage: 85 VAC - 240 VAC
    Over voltage category: 2
    Pollution degree (IEC 664): 2
    Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom
    Power Requirements
    Power input voltage range: 90-230 VAC
    Input frequency range: 50-60 Hz
    PEPS® II User Interface
    (Front Panel)
    Power switch
    4 menu buttons
    LCD display 20 x 2 characters
    2 diagnostic sockets (BNC-type)
    Three-color status LED
    USB port
    PEPS® II Interface
    (Rear Panel)
    AC power entry with EMI filter
    1 air INPUT snap-in port for 1/4" O.D. tubing
    1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing
    4 air snap-in ports for 1/4" O.D. tubing (one per isolator)
    DB-25 male inputs-outputs and feedforward socket
    1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors)
    1 Phoenix 3.5 mm pitch 6 pins BLACK header(horizontal proximity sensors)
    Grounding threaded stud (#10-32 thread)
    DB-25 F socket: 1x digital Input, 3x geophone sensorsinterface (“-VX” option)
    DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional)
    PEPS® II
    Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale
    Analog inputs (feedforward): 5 x 12 bit
    (16 bit using over sampling), ±9 V full scale
    Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping
    Analog input (feedforward) protection: ±15 Volts clipping
    Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale
    Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale
    Analog output protection: indefinite short circuit protection, +5 Volts clipping
    Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)
    Digital output rating: 0…+3.3 V, 20 mA max.
    Digital I/O protection: +5 Volts, -0.5 Volts clipping
    External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max)
    Communication port: USB, appears as RS-232 on PC
    Processor: ARM7TDMI / 41.78 MHz
    Control loop rate: 100 Hz - 2.0 KHz
    Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output
    Velocity sensors - geophones (“-VX” option): 3x vertical, current output
    Long-term height stability: ±50 microns
    Long-term tilt stability: ±50 micro radians
    Servo valves: 4 x 2-way variable-orifice proportional servo valves
    Valving technique: pure class-A
    Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa
    Nominal air consumption: 60 slpm (2 scfm)
    Air requirements: clean, dry air, filtered to 20 microns or better
    Fail safe: isolators deflate on power failure or power off
    Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose
  • Performance +

  • To Order +

    Contact TMC An application engineer will configure a system for your unique requirements and provide a quotation.