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Micro-g® Air Isolators for In-Tool Applications

micro-g floor vibration isolators for OEM integration

  • Overview +


    TMC pneumatic vibration isolation systems are the solution of choice for tool designers seeking superior vibration isolation of ultra-precision instruments. TMC now offers our industry standard Gimbal Piston®, MaxDamp®, and UltraDamp™ isolators in a convenient range of capacities, damping levels and leveling versions to suit a wide-range of applications.

    Ideal for OEM applications, these isolators are offered in a modular, interchangeable, and upgradable design. And, to ensure you specify a version that will meet your settling time and isolation requirements, TMC engineers can model your configuration with our “Moving Stage Application Model.”

  • The TMC Advantage +


    Designed specifically for OEM applications 

    Supporting payloads ranging from 90 kg to 8,200 kg (200 to 18,000 lb.)

    Delivers a high level of vibration attenuation, even in quiet environments

    Multiple levels of damping to choose from

    Multiple versions of height control 

    Isolator designs are interchangeable. Easily accommodates changes of requirements without costly tool redesign

  • Specifications and Technical Drawings +


    Weight Capacities:
    Damping Levels:
    • Gimbal Piston™ for maximum vibration attenuation
    • MaxDamp® for high damping of resonance
    • UltraDamp™ for highest damping of resonance
    Leveling Options:
    • Standard Height Control (+/- 2.5 mm, +/- 0.1 in.)
    • Precision Height Control Valves (+/- 0.25 mm, +/- 0.01 in.)
    • PEPS® II Non-contact
    • Precision Electronic Positioning System (+/- 0.0025 mm, +/- 0.0001 in.)
     

  • Performance +


    Three damping levels. Choose maximum vibration attenuation or aggressive damping for applications with moving stages or robotic motion.


    Gimbal Piston® Air Vibration Isolation

    MaxDamp® Highly Damped Air Vibration Isolation

    UltraDamp™ Highest Damped Air Vibration Isolation

  • Application Photos +


    microg pneumatic vibration isolators application 1 microg pneumatic vibration isolators application 2

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  • Ordering Chart +


    Isolator Ordering Chart
    Capacity Gimbal Piston MaxDamp UltraDamp
    160 kg (350 lb.) 62GP-0160 62MD-0160 62UD-0160
    450 kg (1000 lb.) 62GP-0450 62MD-0450 62UD-0450
    1150 kg (2500 lb.) 62GP-1150 62MD-1150 62UD-1150
    2600 kg (5700 lb.) 62GP-2600 62MD-2600 62UD-2600
    Height Control Ordering Chart
    Type Air Input Usage Part Number
    Standard Valves 0.042 l/min (0.0015 cfm) SV62
    Precision Valves 0.42 l/min (0.015 cfm) PV62
    PEPS II 57 l/min (2 cfm) PEPS62