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Electro-Damp® II Active Air Vibration Cancellation

  • Overview +

    Electro-Damp® is the first commercial active vibration isolation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. The Electro-Damp II is a complete redesign of the original system, adding modularity, digital control, feedforward, high-force/high-clearance actuators, and multiple digital user interfaces specifically designed for use in OEM applications such as microlithography, inspection, and metrology tools.

    Semiconductor manufacturing tools place conflicting demands on their vibration isolation system. In response to floor noise, the system must be soft to effectively filter floor vibration from reaching the isolated surface. Simultaneously, the system must be stiff in response to stage forces such that stage motion induces minimal displacement of the isolated surface and settles rapidly. 

    In addition to employing inertial, active feedback damping, Electro-Damp II uses information feedforward to further improve system response. Feedforward works by taking information from a stage controller about the stage's position and acceleration, then processes that data to provide force actuation to the payload, greatly reducing stage-induced payload motion. The system can read the feedforward information digitally, as bipolar analog signals, or by reading the output of quadrature encoders. The DC-2000 Digital Controller can also automatically adjust the parameters required by feedforward using a stage test pattern. This makes setup on initial installations, or after changes to the payload, quick and easy.

    Electro-Damp II's modularity allows the system to be used with electronic servo valves alone (for heavy, low-acceleration applications like CMMs), with electromagnetic actuation only (for lighter stages which use high rates of acceleration), or a combination of both for the most demanding applications.

  • Features +

    • Six degrees-of-freedom active vibration damping system
    • Non-contacting electronic height control
    • Digital controller
    • Feedforward inputs correct for stage-induced payload motions
    • High-force electromagnetic actuators available separately or integrated
    • Reduced payload motion and settling time for stage-induced motion
    • Higher throughput, resolution and yield
    • Modular design allows user ro specify a complete unit or components for ease of OEM integration
    • Automatic tuning of feedforward parameters for reduced setup
  • Specifications +

    Settling time 0.2 s **
    Active degrees of freedom 6
    Height control accuracy < 10 µm at sensors
    Linear Actuators (horizontal & vertical)
    DC resistance 5 Ω
    Force constant up to 12 lb./A | 55 N/A
    Max. continuous force 25 lbs. | 110 N
    Peak force @ 7 A 87 lbs. | 385 N
    Electrical time const. 2.6 ms
    Stroke 0.25 in. | 6.4 mm
    Transverse clearance 0.09 in. | 2.3 mm
    Stray field < 1 G @ 2 in.
    Dimensions (WxDxH) 2.8 x 6.8 x 4.5 in.
    71 x 173 x 114 mm
    Valving (active only)
    Valve type Proportional E/V servo
    Control type Pressure or air flow
    Max. flow rate 1.5 SCFM
    Air consumption (4 isolators) < 2 SCFM (no stage motion)
    - 3 dB response ≤ 10 Hz typ.
    Height Control Sensors
    Type Non-contacting inductive (eddy current)
    Electronic configuration Two-wire NAMUR
    Three-wire 30 or 18 mm dia.
    Range 15 mm nominal for 30 mm wire
    6 mm nominal for 18 mm wire
    Resolution < 1 µm
    Passive Pneumatic Mount
    Standard capacities 1,000, 2,500, 3,300, 5,700 lbs. @ 80 PSI
    Damping (10:1) < 3 s
    DC-2020 Digital Controller
    Processor Dual core:
    DSP @ 150 MHz & Cortex M3 @ 75 MHz
    Analog I/O 32/24 channels (16/16 bit)
    Sampling rate 5 kHz nominal
    Front panel Power switch
    3-color status LED
    Ethernet RJ-45
    MicroSD card slot
    2x BNC sockets (each can be input or output)
    2x USB 2.0 ports (Type B and Micro B)
    FW upgrade button
    Rear panel Power entry
    Analog I/O sockets
    Pneumatic ports
    Ethernet RJ-45
    1x USB 2.0
    RS-232 DB 9
    Relay socket
    User interface GUI via USB or ethernet
    Power 90-240 VAC, 50-60 Hz, 100 W max.
    Dimensions (WxDxH) 16.8 x 9.0 x 1.75 in.
    427 x 229 x 45 mm
    1 standard RETMA unit
    Power Amplifier
    Channels 8
    Max. current per channel 7 A
    Type Linear
    Peak power 700 W total
    Cooling Ambient, forced air
    Protection Resettable fuses, electronic thermal, over current, under voltage
    Operation Remote or manual
    Dimensions 1 RETMA rack unit height x 15 in. (381 mm) depth

    * Specifications may vary depending on configuration.
    ** Settling time based on a 10x reduction in the disturbance amplitude from the feedforward control and MaxDamp isolators. The actual “ring-down” is not affected by the feedforward technique.

  • Application Notes +

    • Electro-Damp®

      3 Axis (XYZ) Ruling using PEPS II-VX on Precitech's Freeform L Ultra Precision Machine

  • To Order +

    Contact TMC An application engineer will configure a system for your unique requirements and provide a quotation.