Active & Passive Vibration Isolators (OEM)

  • Micro-g Air Isolators for In-Tool Applications

    High-performance Micro-g® pneumatic vibration isolators in a range of weight capacities, damping levels, and height control options for original equipment manufacturer (OEM) in-tool applications

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  • Electro-Damp® II Active Air Vibration Cancellation

    Electro-Damp® is designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. The Electro-Damp II adds modularity, digital control, feedforward, high-force/high-clearance actuators, and multiple digital user interfaces are specifically designed for use in OEM applications.

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  • PEPS® II Active Air Leveling System

    PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability.

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  • Stage-Base™

    TMC’s Stage-Base™ 450 is specifically designed to be the primary vibration cancellation system for advanced semiconductor tools which incorporate high-precision motorized X-Y stages. With the addition of VCM with feed-forward control for even faster settling time to further increase throughput, the result is the most advanced Active Vibration and Motion Cancellation system for moving stage applications.

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