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MaxDamp – Highly Damped Air Vibration Isolation System

micro-g floor vibration isolators for OEM integration

  • Overview +


    MaxDamp is a highly damped version of our Gimbal Piston Air Isolator. Ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage-induced motion of the isolated payload in a low cost system.

    It provides this additional damping for such applications combining Gimbal Piston Air Vibration Isolators with internal, tamper-proof viscous damping. An excellent choice for Semiconductor Inspection and Lithography Tools, and other instruments with relatively high force motorized stages.

  • The MaxDamp Advantage +


    Combines the advantages of self-leveling Gimbal Piston™ Air Isolators with high damping

    Ideal for payloads with robotic motion or motorized stages which require both vibration isolation and aggressive settling of payload induced motion

    Faster tool throughput and higher yields

    Horizontal and vertical vibration isolation starting at 3 Hz

    Minimal amplification of resonance (8-12 dB) 

    Modular design. Upgradable to Electro-Damp® Active Vibration Cancellation

  • Feature +


    • Faster payload settling times.
    • Faster throughput and higher yields for LCD and semiconductor manufacturing and inspection tools.
    • "Stiffer" feel to isolated surface while maintaining high vibration isolation performance.
    • Less vibration induced by air currents and acoustic noise as well as "on-board" generated forces.

  • Performance +


    Compare damping levels between Gimbal Piston®, MaxDamp®, and UltraDamp™



  • Ordering Chart +


    Contact TMC. Many TMC isolators are available with the UltraDamp™ damping level.