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This webinar is a joint presentation between Ametek TMC and PI (Physik Instrumente). Piezoelectric actuators (transducers) are precision ceramic actuators which convert electrical energy directly into linear motion with high speed, force and virtually unlimited resolution. In this webinar we will discuss their application to advanced microscopy in which piezos are used for nanopositioning of samples, focusing of microscopes, and mitigation of floor vibration. All these elements are required to achieve optimal resolution.

This webinar will cover active vibration cancellation technologies for controlling both tool-generated vibration and facility floor vibration in semiconductor manufacturing. As semiconductor manufacturers seek to produce ever-smaller node sizes, vibration control becomes an increasingly important factor in yield, failure analysis, and throughput. Fabs must consider the effects of facility floor vibration as well as tool-generated vibration on tool performance, for both front-end and back-end processes.  

Have you ever wondered how acoustic noise and magnetic fields might be affecting your sensitive e-beam instruments? Have you ever wondered what you can do about it? Our webinar will discuss how magnetic fields and acoustics can harm the performance of e-beam systems and what steps you can take to prevent this from happening. We have real world examples of successful mitigation strategies including before and after images. 

This webinar is intended for the scientist, equipment manufacturer, engineer, architect or facilities manager who wants to understand more about how floor vibration affects sensitive instruments like electron microscopes, semiconductor equipment, optical and other high precision instruments. We will present the theory behind passive and active vibration isolation and review different approaches to controlling it.

This webinar details how to plan for extremely low-amplitude low frequency building vibration when designing an advanced research or technology facility which will house highly sensitive precision instruments. Instruments include electron microscopes, e-beam metrology and lithography, NMR spectrometers and atomic force microscopes. We will review passive and active vibration isolation, massive isolated plinths, and point-of-use active vibration control pedestals. Case studies from three advanced research facilities are included, covering both new construction, and renovation.

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