TMC’s STACIS® Family of Products – A Solution for a Wide Range of Floor Vibration Problems

Friday, October 30, 2009

PEABODY, Massachusetts, – For more than a decade, Technical Manufacturing Corporation’s (TMC) STACIS® active piezoelectric vibration cancellation system has provided the highest level of vibration isolation available to semiconductor manufacturing facilities. The patented STACIS achieves extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. It enables older and less-than-optimal floors to accommodate state-of-the-art tools.

TMC has continually expanded its STACIS product line to solve specific vibration problems caused by ambient building floor vibrations present in semiconductor manufacturing and other precision processes. In addition to the industry-standard STACIS® 2100, recent introductions to the STACIS product family include the STACIS® SEM-Base™ floor platform for scanning electron microscopes (SEMs) and STACIS® iX Stage-Base™ frame-mountable, extended stroke active piezoelectric vibration cancellation system.

“STACIS SEM-Base is a compact, cost-effective alternative to our patented STACIS® active vibration cancellation,” said Steve Ryan, TMC vice president, marketing. “It incorporates STACIS technology but has a much smaller footprint and installs easily with minimal tuning. Simply put the SEM on the platform, power up, and you’re done.”

STACIS® iX Stage-Base™ is designed to be integrated into advanced, high-throughput lithography and metrology tools. The STACIS technology is capable of extremely fast settling of the isolated payload in response to motorized, stage-induced motion, resulting in increased tool throughput.

STACIS Stage-Base provides vibration isolation comparable to TMC’s STACIS 2100 but is specifically designed to be the primary isolation system incorporated inside the tool.

TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company’s products include active and passive vibration isolation systems, optical table systems, and breadboards; laboratory tables and table top platforms; floor platforms; magnetic cancellation and electric field shielding systems; and acoustic enclosures. See the TMC STACIS Portal for more information.

STACIS is a registered trademark and SEM-Base and Stage-Base are trademarks of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.