TMC Introduces STACIS® iX SEM-Base™ [formerly STACIS® FP] Active Hard-Mount Vibration Cancellation Floor Platform for SEMs

Tuesday, May 26, 2009

PEABODY, Massachusetts, –Technical Manufacturing Corporation (TMC) introduces its STACIS® iX SEM-Base™ active vibration cancellation floor platform system designed for use with scanning electron microscopes (SEMs) at SEMICON West 2009 in San Francisco, July 14-16.

STACIS iX SEM-Base features sub-Hz vibration cancellation in an active hard-mount floor platform that fits most commercial SEMs. SEMs are among the most vibration sensitive tools made, and these precision instruments typically incorporate an internal vibration isolation system. STACIS iX SEM-Base is compatible with all internal SEM vibration isolation systems.

STACIS iX SEM-Base is a compact, cost-effective alternative to our patented STACIS® active vibration cancellation,” said Steve Ryan, TMC vice president, marketing. “It incorporates STACIS technology but has a much smaller footprint and installs easily with minimal tuning. Simply put the SEM on the platform, power up, and you’re done.

With vibration cancellation starting below 1 Hz, STACIS iX SEM-Base features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC’s DC 2000 digital controller. The system is only 5.5 inches tall, measures 35.5" x 44.5", weighs less than 400 pounds, and can support 900 to 2,500 pounds with no soft air suspension. It is available with three or six degrees of freedom.

TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company’s products include active and passive vibration isolation systems; optical tops, optical table systems, and breadboards; laboratory tables and table top platforms; floor platforms; magnetic cancellation and electric field shielding systems; and acoustic enclosures.

STACIS, Electro-Damp and CleanTop are registered trademarks and TableTop PZT and FloorPlatform PZT are trademarks of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.