TMC’s STACIS® iX™ Stage-Base™ [formerly STACIS® FM] – New Frame-Mountable Vibration Isolation System Increases Tool Throughput

Tuesday, July 14, 2009

PEABODY, Massachusetts, – Technical Manufacturing Corporation (TMC) introduces STACIS® iX Stage-Base™, a hard-mount active vibration cancellation system, at Semicon West 2009 today. STACIS® iX Stage-Base™ is the newest addition to TMC’s family of STACIS® advanced piezoelectric vibration isolation products designed to control building floor vibrations in semiconductor manufacturing facilities

The frame-mountable STACIS® iX Stage-Base™ incorporates TMC’s patented STACIS technology to achieve extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. It is designed to be integrated into advanced, high-throughput lithography and metrology tools. The STACIS technology is capable of extremely fast settling of the isolated payload in response to motorized, stage-induced motion, resulting in increased tool throughput.

“TMC continues to apply advancing technology to develop new solutions to the challenging demands that semiconductor tools place on their vibration isolation systems,” said Steve Ryan, TMC vice president, marketing. “STACIS® iX Stage-Base™ provides vibration isolation comparable to our STACIS active piezoelectric vibration cancellation systems but is specifically designed to be the primary isolation system incorporated inside the tool.”

STACIS® iX Stage-Base™ features extended stroke piezoelectric actuators, fast settling time in response to stage motion, and a hard-mount suspension with no soft air springs. It is available in either 3 or 6 degrees of freedom and starts to isolate well below 1 Hz.

TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified company’s products include active and passive vibration isolation systems; optical tops, optical table systems, and breadboards; laboratory tables and table top platforms; floor platforms; magnetic field cancellation and electric field shielding systems; and acoustic enclosures.

STACIS is a registered trademark of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.