TMC Introduces Electro-Damp,® PZT at Semicon West - A Breakthrough in Vibration Isolation for Semiconductor Tools

Tuesday, July 17, 2007

PEABODY, Massachusetts,Technical Manufacturing Corporation (TMC) introduced the Electro-Damp® PZT active inertial vibration cancellation system today at Semicon West in San Francisco.

Electro-Damp PZT combines the best features of TMC’s STACIS® active hard-mount and its Electro-Damp® active air mount systems. Stacis achieves extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. Electro-Damp® is an active, inertially damped, pneumatic vibration isolator. The new Electro-Damp PZT incorporates the best of both patented technologies to provide a cost-effective, frame-mountable, stiff, yet extremely efficient, vibration isolation system for use in microlithography, inspection, and metrology tools.

“TMC continues to employ advancing technology to develop new products that solve the conflicting demands semiconductor tools place on their vibration isolation systems,” said Steve Ryan, TMC vice president, marketing. “The new Electro-Damp PZT is a simple, robust, cost-effective product with vibration isolation comparable to our Stacis active piezoelectric vibration cancellation system.”

Electro-Damp PZT features extended stroke piezoelectric actuators, fast settling time in response to stage motion, and has no soft air suspension. Available in either 3 DOF or 6 DOF, the compact Electro-Damp PZT installs easily with no feedforward required.

TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001-certified company’s products are industry standards in semiconductor manufacturing, life sciences and photonics and also used in academic, industrial and military researc

STACIS and Electro-Damp are registered trademarks of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.