TMC Introduces Introduces FloorPlatform PZTª Active Hard-Mount Vibration Cancellation for SEMs

Monday, August 6, 2007

PEABODY, Massachusetts,Technical Manufacturing Corporation (TMC) introduced its FloorPlatform PZT™ active inertial vibration cancellation system designed for use with scanning electron microscopes (SEMs) at the 2007 Microscopy & Microanalysis show held this week in Ft. Lauderdale.

The FloorPlatform PZT features sub-Hz vibration cancellation in an active hard-mount floor platform that fits most commercial SEMs. SEMs are among the most vibration sensitive tools made, and these precision instruments typically incorporate an internal vibration isolation system. FloorPlatform PZT is compatible with all internal vibration isolation systems.

FloorPlatform PZT is a compact, cost-effective alternative to our patented STACIS® active vibration cancellation,” said Steve Ryan, TMC vice president, marketing. “It incorporates Stacis technology but has a much smaller footprint and installs easily with minimal tuning. Simply put the SEM on the platform and you’re done.”

With vibration cancellation starting below 1 Hz, FloorPlatform PZT features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC’s DC 2000 digital controller. The system can support 900-1,600 lbs. and has no soft air suspension. It is available with three or six degrees of freedom.

TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001-certified company’s products are industry standards in semiconductor manufacturing, life sciences and photonics and also used in academic, industrial and military research.

STACIS is a registered trademark and FloorPlatform PZT is a trademark of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.