Ultratech Stepper Chooses TMC for Advanced Vibration Control

Friday, February 7, 2003

PEABODY, Massachusetts,Technical Manufacturing Corporation (TMC) has announced that Ultratech Stepper, Inc. has chosen TMC's Electro-Damp® II Active Vibration Control System as the new platform for its 200 and 300 mm Saturn Spectrum and Titan Wafer Stepper family.

“We are extremely pleased to be partnered with Ultratech for their vibration control and stage feedforward cancellation requirements,” said Ulf Heide, President of TMC. “At TMC, we have been providing advanced vibration control solutions to stepper companies for over 20 years. Over that time, there has been an incredible growth in the needs of our customers and the sophistication of our solutions.”

Ultratech plans to incorporate Electro-Damp® II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology, and optical networking applications.

Each patented Electro-Damp® II system will include TMC’s DC-2000 digital controller, non-contacting electronic valving system, Gimbal Piston™ isolator, and high force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool.

We are very pleased to see that our technology, manufacturing capabilities, and products are such a perfect match for Ultratech,” said Steve Ryan, V.P., Marketing, of TMC. “Steppers have consistently offered the greatest challenge to precision vibration control of any application we face. Electro-Damp® II uses stage feedforward cancellation as well as active feedback to provide the low frequency vibration cancellation and fast settling time of stage-induced motion demanded by a state-of-the-art stepper.”

TMC is a unique blend of dual core capabilities – unparalleled expertise in precision floor vibration control and a commitment to manufacturing using advanced precision metal fabrication techniques. The ISO-certified company’s industry-standard product line includes STACIS® piezoelectric active vibration isolation systems; Electro-Damp® pneumatic / linear motor-based active vibration isolation systems; CleanTop® II optical tables and breadboards; Gimbal Piston™ pneumatic vibration isolation systems; Quiet Island™ sub-floor platforms for cleanroom raised floors; state-of-the-art active isolators; laboratory tables; and OEM isolator designs and acoustic enclosures. Standard and custom configurations plus a broad array of accessories are available.

STACIS®, Quiet Island® and Electro-Damp® are registered trademarks and CleanTop® and Gimbal Piston™ are trademarks of Technical Manufacturing Corporation.

Steve Ryan
Technical Manufacturing Corp.
E-mail: sales@techmfg.com