SEM-Base® VI

  • Overview +


    SEM-Base® VI, the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer. 

    SEM-Base® VI uses a unique "serial architecture" in which the vibration sensors measure floor vibration, not payload vibration. This ensures that, unlike other designs, payload resonances do not inherently limit vibration isolation or cause instability. The vibration sensors are low frequency inertial velocity sensors for maximum sensitivity in the difficult to measure sub-hz range. Combined with our unique piezo-actuator technology, SEM-Base VI achieves extremely high levels of vibration cancellation, even on already quiet floors. 

    SEM-Base® VI provides, on average, 6 dB more vibration isolation than previous models. In addition, TMC's next generation controller, the DC-2020, features a new dual-core processor and provides tool owners and researchers with a very simple and easy-to-use graphical interface for fast system assessment and operational peace-of-mind. When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser with no additional software or application program to install. Alternatively, the user can interface with the controller via an on-board menu-driven Liquid Crystal Display (LCD). 


    NOTE: See SEM-Closure™, a total environmental solution designed specifically to protect SEMs. It can accommodate SEM-Base and Mag-NetX®  in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.

  • The SEM-Base® VI Advantage +


    Hard-Mount Technology – SEM-Base® VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

    Active Inertial Vibration Cancellation – SEM-Base® VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 

    Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

  • Specifications +


    • Incorporates proprietary STACIS® technology
    • Active inertial vibration cancellation system
    • 895 x 1124 x 160 mm (35.25 x 44.25 x 6.3 in.)
      fits most commercial SEMs
    • Load capacity:
      • Standard Version: 408 - 1134 kg (900 - 2,500 lb.)
      • High Capacity Version: 1134 - 1452 kg (2,500 - 3,200 lb.)
    • Isolation efficiency at 1 Hz: 40-70%
      Isolation efficiency at 2 Hz: 90%
      Isolation efficiency at 3 Hz and higher: 90-98%
    • 6 active degrees-of-freedom
    • Installs easily, minimal tuning required
    • Compatible with all internal tool vibration isolation systems
    • Power requirement: 100-240 VAC, 50/60 Hz, <600 W
    • Air requirement: none
    • CE and RoHS compliant
    • Fully-Integrated Single-Platform design
    • Optional casters allow easy portability, no lifting required
    • Compatible with SEM-Lift™ System


  • Performance +


  • Accessories +


    Click here to view the Accessories 

  • Application Photos +

  • Application Notes +

    • SEM-Base®

      Before and After Images, Hitachi S-4800 on STACIS iX SEM-Base®

    • SEM-Base®

      Before and After Images, Zeiss Auriga FIB-SEM on STACIS® iX SEM-Base® with Mag-NetX®

    • SEM-Base®

      Case Study: Active Piezoelectric Vibration Cancellation Enables Advanced Electron and Ion Beam Instruments in Harsh City Environments

  • To Order +