• Overview +

    STACIS® III is the most advanced active vibration cancellation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

    Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.

    STACIS III includes a new and improved digital controller, the DC-2020. With a new dual-core processor and Ethernet as well as USB serial ports on the front and rear panels, this new advanced control system provides the user with a modern and easy to use Graphical User Interface (GUI). With many hundreds of successful installations worldwide, STACIS is the ideal vibration cancellation system for the most vibration-sensitive instruments. 
  • The STACIS® III Advantage +

    Hundreds of times stiffer than air isolatorsSTACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

    The unique serial design and proprietary high-force piezoelectric technology 
    results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration cancellation with 90% reduction starting at 2 Hz.

  • Specifications +

  • Performance +

  • Application Notes +

  • Application Photos +

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  • To Order +

    STACIS® III Systems are engineered-to-order for your specific tool and floor condition. 
    Please contact our Active Products Application Engineering Team so that we may propose a suitable configuration for your application.