Relative Benefits of TMC Active Products
Compared to Our Gimbal Piston™ Air Isolator
February 04, 2012
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Relative Benefits of TMC Active Products
Compared to Our Gimbal Piston™ Air Isolator
Settling Curve Comparison
Vertical Transmissibilty Curve* Comparison
Advanced Products Comparison Chart
Product
Vibration Isolation
Settling
Time
Height
Stability
Compatible with Moving Stages
Docking Capability
Feed-
Forward
Price
PEPS
®
Precision Electronic Positioning System
Slightly Improved*
Normal to slightly improved*
Excellent
Yes
Possible in some cases
Yes
(analog only)
Low
to Medium
PEPS-VX
®
Vibration Cancellation System
Excellent Vertically, Same Horizontally as Gimbal Piston™
Very good for accelerations, slow for displacements
Good
Low acceleration stages only
No
No
Low
to Medium
CSP
®
Compact
Sub-Hertz Pendulum
Same Vertically as Gimbal Piston Excellent Horizontally
Reduces Horizontal accelerations 10x*
Normal*
Yes
Yes
N/A
Low
MaxDamp
®
Less than Gimbal Piston
Up to 5x faster than Gimbal Piston
Normal*
Yes, best for heavy stages and high accelerations / forces
Yes
N/A
Slightly more than Gimbal Piston
AccuDock™ Docking System
N/A
Excellent when docked
Yes
Yes exclusively for docking
N/A
Low
STACIS
®
2100 Piezoelectric Active Vibration Control System (Analog)
Excellent. The best at frequencies below 20Hz
Excellent
Excellent (1day settling required)
Yes
Not required
No
High
Electro-Damp
®
PLS DSP Precision Leveling System
Slightly Improved*
Normal to Slightly Improved
Excellent
Yes
Yes
Yes (analog and Digital)
Medium
Electro-Damp
®
II
Excellent,
1 Hz< and above
Very good for acceleration slow for position
Excellent when Docked
Yes
Yes
Yes (analog and digital)
Medium to high
* Compared to standard TMC Gimbal Piston™ isolation systems
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