Relative Benefits of TMC Active Products Compared to Our Gimbal Piston™ Air Isolator

Advanced Products

Relative Benefits of TMC Active Products
Compared to Our Gimbal Piston™ Air Isolator

Settling Curve
Comparison

Vertical Transmissibilty
Curve* Comparison

Advanced Products Comparison Chart

Product	Vibration Isolation	Settling Time	Height Stability	Compatible with Moving Stages	Docking Capability	Feed- Forward	Price
PEPS^® Precision Electronic Positioning System	Slightly Improved*	Normal to slightly improved*	Excellent	Yes	Possible in some cases	Yes (analog only)	Low to Medium
PEPS-VX^® Vibration Cancellation System	Excellent Vertically, Same Horizontally as Gimbal Piston™	Very good for accelerations, slow for displacements	Good	Low acceleration stages only	No	No	Low to Medium
CSP^®Compact Sub-Hertz Pendulum	Same Vertically as Gimbal Piston Excellent Horizontally	Reduces Horizontal accelerations 10x*	Normal*	Yes	Yes	N/A	Low
MaxDamp^®	Less than Gimbal Piston	Up to 5x faster than Gimbal Piston	Normal*	Yes, best for heavy stages and high accelerations / forces	Yes	N/A	Slightly more than Gimbal Piston
AccuDock™ Docking System	N/A		Excellent when docked	Yes	Yes exclusively for docking	N/A	Low
STACIS^® 2100 Piezoelectric Active Vibration Control System (Analog)	Excellent. The best at frequencies below 20Hz	Excellent	Excellent (1day settling required)	Yes	Not required	No	High
Electro-Damp^®PLS DSP Precision Leveling System	Slightly Improved*	Normal to Slightly Improved	Excellent	Yes	Yes	Yes (analog and Digital)	Medium
Electro-Damp^®II	Excellent, 1 Hz< and above	Very good for acceleration slow for position	Excellent when Docked	Yes	Yes	Yes (analog and digital)	Medium to high

* Compared to standard TMC Gimbal Piston™ isolation systems