 |
click here for a larger image
 
Controller with sensor mounting/adjustment
block assembly
click for large image
Building
upon our ability to use advanced control techniques to actively sense
and cancel building floor vibrations, we now offer
Mag-NetX™,
a product that actively compensates for magnetic
field fluctuations.
Designed both for point-of-use
and OEM applications, Mag-NetX™ is ideal for scanning and transmission electron microscopes,
electron beam lithography systems, ion beam instruments,
and any tools that incorporate a charged beam. Combined with TMC’s
advanced vibration isolation systems, Mag-NetX™ provides
the ultimate control of vibration and magnetic
fields.
Mag-NetXª
System with Helmholtz coils mounted on
a
Hitachi S-4700 scanning electron microscope column console.
- Continuous field cancellation
- Continuous field monitoring
- Set and forget operation
- AC field cancellation
- Optional DC field cancellation
- 50x field improvement (typical)
- Dynamic, 100 μs response
- Accurate field measurement
- Interface for computer monitoring
- Feedforward compensation of line frequency
and harmonics
- Feedforward capability for other inputs
 Photos
courtesy of Drexel University. Mag-NetXª Systems
protect Zeiss
Supra VP50 (left) and FEI ESEM (right) scanning electron
microscopes.
 click
here to download a printable pdf.
Back to top
Plot
1. Transer function at the exact sensor location.
Excitation coil is not part of cancellation
system. Sensor is the magnetic flux gauge and
it is part of cancellation system. For
larger images click here
Plot 2. Transfer functions
in the volume of 0.5 x 0.5 x 2.5
feet. Excitation and sensor coils are
NOT part of cancellation system. Excitation
coil positioned outside Helmholtz cage, sensor coil
positioned near magnetic flux gauge and has
dimensions of 0.5 x 2.5 feet. For
larger images click here
click
here to download a printable pdf
Back
to top |
| NEW
FROM TMC!
|
|
GENERAL SPECIFICATIONS
(may vary depending upon configuration) |
| System
Components |
| |
Up to 3-axes orthogonal magnetic
sensor, EM Cancellation Controller, Up to 6 orthogonal coils |
| PERFORMANCE |
| Active magnetic field cancellation
axes: |
| |
X, Y, Z |
| Controlling volume vs.
field flux density: |
| |
60 m3 at 10μT RMS |
| |
20 m3 at 50μT RMS |
| |
(able to cancel Earth magnetic field) |
| Max ambient DC field: |
| |
 100μT max |
| Dynamic range: |
| |
100 μT (60dB max) |
| Field reduction ratio at sensor
location: |
| |
40dB [100 x] (typical) in
0.5 - 100 Hz |
| |
| |
25dB [20 x] (typical) in
100 - 500 Hz |
| |
(See
Plot 1) |
Field reduction ratio in a typical
volume of Electronic Microscope column:
h x w x t = 2.5 x 0.5 x 0.5
feet
(75 x 15 x 15 cm) |
| |
33dB [30 x] (typical)
in 0.5 - 100 Hz |
| |
20dB [10 x] (typical) in
100 - 500 Hz |
| |
0 dB at 1000 Hz |
| |
(See
Plot 2) |
| Bandwidth |
| |
0.5 - 1000 Hz |
| Noise threshold |
| |
0.1 nT/√Hz at 50-60 Hz |
 |
|
EMC
CONTROLLER |
| 1U standard case: |
| |
3 channels for X, Y, Z, cancellation |
| Dimensions of controller: |
| |
19 in. -1U, 14.2 in. deep
(48 x 4 x 36 cm) |
| Operational modes: |
| After power-on: Automatic
self test |
| |
Calibration and switch to controlled
mode in 30-45 sec., no user involvement
required. Manual test/debug mode. |
| Front Panel Controls: |
"OK" LED
indicator:
|
| |
Green - OK
Yellow - warning/error |
| LCD
2 x 32 symbols indicator: |
| |
Show menu and status |
| Bar-LED indicators: |
| |
Show X, Y, Z real time
field strength |
| 2 rocker switches: |
| |
For menu access |
| BNC
Socket: |
| |
For calibration/testing/
debugging |
| Interfaces: |
| RS-232
socket |
| |
For external interface,
accepts ASCII commands |
| GO - NO GO
signal |
| |
Binary, for usage as input
Êfor protected system |
| Power: |
| |
200 VA max |
| Supply voltage: |
| |
90-240 VAC 50/60 Hz |
| Internal line feedforward input: |
| |
Cancels line frequency (50/60 Hz and Harmonics),
allows increased loop gain for better
suppression of other frequencies |
| 3 Auxiliary inputs: |
| |
Can be used as feedforward to cancel disturbances
from moving objects (sample on X-Y
stage, for example.) |
Contact TMC. An Applications Engineer
will configure a system for your unique
requirements and provide a quotation. |
|
