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Ultra-High
Stiffness Platforms incorporating our proprietary TechCast Resin-Aggregate
Core for scanner and other equipment pedestals
TMC has complete in-house structural
analysis, FEA, and vibration testing capabilities. |
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General Specifications:
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- Guaranteed to meet commercial
scanner floor stiffness specifications
(upon review of site-specific floor data)
- Stainless steel top and edge
exterior finish.
- Custom designed to meet tool
and site requirements.
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Features:
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Benefits:
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Combines TMC proprietary platform
laminated steel plate construction with high strength resin-aggregate
core
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Modular design allows a platform
to be combined with a variety of TMC stands to accommodate any
floor height.
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Pre-engineered in close cooperation
with equipment manufacturers to ensure spec compliance and utility
compatibility.
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Engineering support. Simply
specify the tool, the floor height and sub-floor type. We do the
rest.
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Support stands compatible with
a variety of floor heights, sub-floor geometries and “pop-out” patterns.
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Ultra-high stiffness construction.
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Cleanroom
compatible construction
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Part of the TMC Quiet Island® family
of products.
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Precision manufacturing method
assures a much flatter surface than concrete.
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- Cleaner construction than concrete, all stainless
steel exterior. Top may be drilled and tapped.
- Easier and less expensive to install.
- Support stand system does not “block-out” complete
tool footprint.
- Portable, may be moved as fab requirements
change.
- Lower cost-of-ownership (reusable components).
- TMC is the world's leading designer and
manufacturer of precision vibration control systems. You can be
confident that the pedistal is designed with an unparalleled understanding
of vibration control and sound manufacturing techniques.
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LEGEND |
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Actual Measured TMC TechCast
scanner platform in a semiconductor fab. |
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Minmum/Maximum
envelope of current commercial scanner floor
stiffness specifications as a function of frequency. This is based
on TMC's understanding of the manufacturers specifications as of
December 2003. TMC is not responsible for the accuracy of, or changes
to these secifications.
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