Floor Platforms    
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SPACER
July 30, 2010
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TechCast
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Ultra-High Stiffness Platforms incorporating our proprietary TechCast Resin-Aggregate Core for scanner and other equipment pedestals

TMC has complete in-house structural analysis, FEA, and vibration testing capabilities.

Testing of TMC's new TechCastÈ
General Specifications:
  • Guaranteed to meet commercial scanner floor stiffness specifications
    (upon review of site-specific floor data)
  • Stainless steel top and edge exterior finish.
  • Custom designed to meet tool and site requirements.
Features:
Benefits:

  • Combines TMC proprietary platform laminated steel plate construction with high strength resin-aggregate core
  • Modular design allows a platform to be combined with a variety of TMC stands to accommodate any floor height.
  • Pre-engineered in close cooperation with equipment manufacturers to ensure spec compliance and utility compatibility.
  • Engineering support. Simply specify the tool, the floor height and sub-floor type. We do the rest.
  • Support stands compatible with a variety of floor heights, sub-floor geometries and “pop-out” patterns.
  • Ultra-high stiffness construction.
  • Cleanroom compatible construction
  • Part of the TMC Quiet Island® family of products.
  • Precision manufacturing method assures a much  flatter surface  than concrete.

  • Cleaner construction than concrete, all stainless steel exterior. Top may be drilled and tapped.
  • Easier and less expensive to install.
  • Support stand system does not “block-out” complete tool footprint.
  • Portable, may be moved as fab requirements change.
  • Lower cost-of-ownership (reusable components).
  • TMC is the world's leading designer and manufacturer of precision vibration control systems. You can be confident that the pedistal is designed with an unparalleled understanding of vibration control and sound manufacturing techniques.
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  LEGEND
  Actual Measured TMC TechCast scanner platform in a semiconductor fab. 
       
 
     
Minmum/Maximum envelope of current commercial scanner floor stiffness specifications as a function of frequency. This is based on TMC's understanding of the manufacturers specifications as of December 2003. TMC is not responsible for the accuracy of, or changes to these secifications.
 
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