 |
No feedforward required |
|
Active inertial vibration cancellation
systems |
|
Fast settling time in response to
stage motion |
|
No soft air suspension
|
|
Simple, robust, and cost-effective |
| |
|
|
Incorporates patented STACIS® technology |
|
Extended stroke piezoelectric actuators,
up to 60 microns |
|
Position repeatability of payload to
within microns |
|
Frame-mountable design |
|
6 active degrees of freedom |
| |
|
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