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5,823,307, Other Patents Pending |
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Features
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| Incorporates patented STACIS® technology | |
| Extended stroke piezoelectric actuators, up to 60 microns | |
| Position repeatability of payload to within microns |
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| Frame-mountable design | |
| 3 or 6 active degrees-of-freedom | |
| No feedforward required | |
| Active inertial vibration cancellation system |
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| Fast settling time in response to stage motion |
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| No soft air suspension | |
| Simple, robust, and cost-effective | |
Internal Vibration cancellation system increases throughput
in semiconductor inspection and metrology tools