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5,823,307, Other Patents Pending |
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Features
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Incorporates patented STACIS® technology |
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Extended stroke piezoelectric actuators, up to 60 microns |
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Position repeatability of payload to within microns |
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Frame-mountable design |
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3 or 6 active degrees-of-freedom |
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No feedforward required |
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Active inertial vibration cancellation system |
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Fast settling time in response to stage motion |
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No soft air suspension |
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Simple, robust, and cost-effective |
Internal Vibration cancellation system increases throughput
in semiconductor inspection and metrology tools
