March 13, 2010
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STACIS® iX
SEM-Base™

Active Piezoelectric Vibration Cancellation Floor Platform
for Scanning Electron Microscopes


New!
larger image of STACIS® iX SEM-Base™ Transmissibility Curves.
See a larger illustration of the
STACIS® iX SEM-Base™ Floor Platform.
STACIS® SEM-Base™ Transmissibility Curves
U.S. Patent Nos. 5,660,255,
5,823,307, Other Patents Pending
Features
triangle Incorporates patented STACIS® technology
triangle Active inertial vibration cancellation system
triangle 35.5 x 44.5 x 5.5 inches, fits most commercial SEMs
triangle Load capacity: 900 - 2,500 lb.
triangle Vibration cancellation starts
below 1 Hz
triangle Extended stroke piezoelectric  actuators, up to 60 microns
triangle 3 or 6 active degrees-of-freedom
triangle Installs easily, minimal tuning 
required
triangle Compatible with all internal tool vibration isolation systems
triangle No soft air suspension
triangle Simple, robust, and cost-effective
triangle Optional casters allow easy portability, no lifting required
triangle Ask about our SEM-Lift™ System for installation

STACIS SEM-Base Active Piezoelectric Vibration Cancellation Floor Platform for SEMs

See a larger image of the STACIS® iX SEM-Base™
Active Piezoelectric Vibration Cancellation Floor Platform for SEMs

 

How to Order

Contact a TMC Applications Engineer for part numbers
and pricing.

STACUS® SEM-Base™ Installation at MIT
Back to Floor Platforms
STACIS® Product line
STACIS® iX Stage-Base™ Frame Mountable Active Hard-Mount Piezoelectric Vibration Cancellation System
  Quiet Island® STACIS 2100 Active Piezoelectric   Vibration Cancellation System
65 SERIES Floor Platform with STACIS®
  65 SERIES Floor Platform with Gimbal Piston™
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