STACIS^® iX SEM-Base™ active vibration cancellation floor platform system is designed for use with scanning electron microscopes (SEMs). SEMs are among the most vibration sensitive tools made, and these precision instruments typically incorporate an internal vibration isolation system. SEM-Base is compatible with all internal SEM vibration isolation systems.

SEM-Base is a compact, cost-effective alternative to our 65 Series STACIS® 2100 Floor Platform. It incorporates STACIS technology but has a much smaller footprint and installs easily with minimal tuning.

With vibration cancellation starting below 1 Hz, SEM-Base features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC’s DC 2000 digital controller. The system is only 6.5" tall, measures 35.5" x 44.5", weighs roughly 500 lb., and can support 900 to 2,500 pounds with no soft air suspension.