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5,823,307, Other Patents Pending |
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Features
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| Incorporates patented STACIS® technology | |
| Active inertial vibration cancellation system | |
| 35.5 x 44.5 x 5.5 inches, fits most commercial SEMs | |
| Load capacity: 900 - 2,500 lb. | |
| Vibration cancellation starts below 1 Hz |
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| Extended stroke piezoelectric actuators, up to 60 microns | |
| 3 or 6 active degrees-of-freedom | |
| Installs easily, minimal tuning required |
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| Compatible with all internal tool vibration isolation systems | |
| No soft air suspension | |
| Simple, robust, and cost-effective | |
| Optional casters allow easy portability, no lifting required | |
| Ask about our SEM-Lift™ System for installation | |

