TMC Technical Manufacturing Corporation
83 Series – Rigid-Damped Tripod

November 24, 2014

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83 SERIES
Rigid-Damped Tripod
For Semiconductor Wafer Fab Equipment Support   


Rigid Damped Tripod curves
   See a larger image.

 Features
  • Low cost
  • No need to engineer a structure for each tool application.
  • Easy rigging, the lightweight tripods can be quickly installed without specialized lifting equipment.
  • Portability, the tripods may be relocated as fab requirements change.
  • Cleanroom compatible powder coat finish.
  • Proprietary structural damping facilitates mounting of even vibration sensitive equipment.
  • Geometry allows clearance of most "pop-out" patterns.
  • One-inch vertical travel range to ensure mounting is flush with raised floor.
  • Meets seismic code requirements (Uniform Building Code.)


Ordering  Chart - Contact TMC for details.

Tripod Model Description H S  T Wt.
83-201-12
Rigid Damped Tripod for12 in. (300 mm) high floor 12"
(300 mm)
10"
(203 mm)
8"
(203 mm)
50 lb.
(22.7 kg)
83-201-18
Rigid Damped Tripod for 18 in. (450 mm) high floor 18"
(450 mm)
14"
(356 mm)
8"
(203 mm)
85 lb.
(38.6 kg)
83-201-24
Rigid Damped Tripod for 24 in. (600 mm) high floor 24"
(600 mm)
14"
(356 mm)
12"
(305 mm)
130 lb.
(59.0 kg)
83-202-01
Rigid-Damped Tripod tool foot attached clamp        
   
NEW FROM TMC!
U.S. Patent No. 5,947,430
General Specifications
Natural fequency:
(with 2000 pound load): 
 Vertical = 130 Hz
 Horizontal = 120 Hz
Maximum amplification at resonance:
 Vertical = 10 dB
 Horizontal = 5 dB
Capacity:
2500 pounds
Finish:
Steel with Black Powder
Coat Paint
Rigid Damped Tripod Illustration             See a larger image


Tool foot
attach clamp


Proprietary
laminated
design adds
structural
damping

Leveling feet
and anchor
bolt slots

Rigid-Damped Tripod


Square top
plate rotates
to align
with raised
floor tiles


Heavy guage
steel tripod
for rigid
non-resonant
support
 
See a larger image.


Mounting of such equipment has been an ongoing source of difficulty for tool and facility engineers. The combination of tall, lightweight raised floors, more massive and sensitive equipment and utility holes or "pop-outs" in the sub-floors have stretched conventional sub-floor pedestals to the limits of their intended performance. Such pedestals are cumbersome, expensive and require special on-site engineering for each tool at each site. Furthermore, such pedestals are large steel structures prone to resonance with little or no structural damping. Simply designing a stiff structure is not adequate. For sensitive inspection tools, rigidity combined with aggressive structural damping is the only sound approach.">Rigid Damped Tripods


The Rigid-Damped Tripod solves all of these problems at a surprisingly low price, making it the preferred solution for not only vibration sensitive tools but any tool too massive to be placed on the raised floor.



 

STACIS® Product line
STACIS® iX Product line
Floor Stands and Posts

Rigid Leveling Stands:
Tripods
Quads

Square Posts

Gimbal Piston ™ Air Isolators
See Also: Supports
 4 Post System
 6 Post System
 Free Standing Posts
 Modular Posts

(800) 542-9725
  
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