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The Rigid-Damped Tripod is a true innovation for mounting semiconductor equipment in a raised-floor, cleanroom environment.

Mounting of such equipment has been an ongoing source of difficulty for tool and facility engineers. The combination of tall, lightweight raised floors, more massive and sensitive equipment and utility holes or "pop-outs" in the sub-floors have stretched conventional sub-floor pedestals to the limits of their intended performance. Such pedestals are cumbersome, expensive and require special on-site engineering for each tool at each site. Furthermore, such pedestals are large steel structures prone to resonance with little or no structural damping. Simply designing a stiff structure is not adequate. For sensitive inspection tools, rigidity combined with aggressive structural damping is the only sound approach.

The Rigid-Damped Tripod solves all of these problems at a surprisingly low price, making it the preferred solution for not only vibration sensitive tools but any tool too massive to be placed on the raised floor.

• Low cost
• No need to engineer a structure for each tool application.
• Easy riggingÑ the lightweight tripods can be quickly installed without specialized lifting equipment.
• PortabilityÑ the tripods may be relocated as fab requirements change.
• Cleanroo-compatible finish.
• Proprietary structural damping facilitates mounting of even vibration sensitive equipment.
• Geometry allows clearance of many "pop-out" patterns.
• One-inch vertical travel range to ensure mounting is flush with raised floor.
• meets seismic code requirements (Uniform Building Code.) Contact TMC for details.