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U.S. Patent Nos. 5,660,255, 5,823,307, Other Patents Pending |
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Incorporates patented STACIS® technology |
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Active inertial vibration cancellation system |
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35.5 x 44.5 x 5.5 inches, fits most commercial SEMs |
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Load capacity: 900 - 2,500 lb. |
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Vibration cancellation starts below 1 Hz |
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Extended stroke piezoelectric actuators, up to 60 microns |
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3 or 6 active degrees-of-freedom |
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Installs easily, minimal tuning required |
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Compatible with all internal tool vibration isolation systems |
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No soft air suspension |
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Simple, robust, and cost-effective |
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Optional casters allow easy portability, no lifting required |
| Ask about our SEMLift® System for installation | |
