Electro-Damp® – Active Vibration Isolation

  • Electro-Damp® II

    Electro-Damp® is designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. The Electro-Damp II adds modularity, digital control, feedforward, high-force/high-clearance actuators, and multiple digital user interfaces are specifically designed for use in OEM applications.

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  • PEPS® II

    PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability.

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