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STACIS® III

Piezoelectric Active Vibration Cancellation System
STACIS III 3 isolators and controller
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STACIS® III is the most advanced active vibration cancellation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion.

Initially designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments, including but not limited to semiconductor fabs, failure analysis labs, nanotechnology research, nanofabrication facilities, and materials research.

STACIS III includes a new and improved digital controller, the DC-2020. With a new dual-core processor and Ethernet as well as USB serial ports on the front and rear panels, this new advanced control system provides the user with a modern and easy to use Graphical User Interface (GUI).

With many hundreds of successful installations worldwide, STACIS is the ideal vibration cancellation system for the most vibration-sensitive instruments.
Installation image of STACIS supporting a subfloor platform
STACIS® System on “risers” installed under a custom designed TMC Quiet Island® subfloor platform to support an eBeam lithography tool in a 36” tall raised floor.
Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no “soft” suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

The unique serial design and proprietary high-force piezoelectric technology results in a wide active bandwidth starting at 0.6 Hz and unmatched vibration cancellation at 1-3 Hz.

STACIS system installation with Bruker BioSpin
A STACIS® System, incorporating a non-ferromagnetic, highly damped, aluminum platform, provides a second stage of vibration isolation for a Bruker BioSpin 600 MHz NMR Spectrometer. Photo courtesy of Bruker BioSpin and Memorial Sloan Kettering Cancer Center.
Installation photo of STACIS supporting a LIGO Interferometer
STACIS® supporting the end chambers of a prototype LIGO interferometer at the California Institute of Technology. These are the most precise instruments ever made – capable of measuring distances of less than 10-18 meters.