Provides greater than 90% isolation at frequencies greater than 2 Hz, vertical and horizontal

Reduces fab floor construction costs, allows tools to be installed in higher vibration environments

Active bandwidth, 0.6 Hz to 250 Hz

Recommended by many tool manufacturers

6 degree-of-freedom active hard mount design, no soft air suspension

Installs easily, robust control system requires minimal or no on-site compensation

A point-of-use solution that is compatible with all internal tool vibration isolation systems

Ensures tool vibration criteria will be met as fab vibration levels increase over time

Uses TMC’s patented STACIS® technology to cancel vibration using piezoelectric actuators

Enables older and noisier floors to accommodate state-of-the-art tools

Compatible with various floor heights and sub-floor geometries

Increases throughput, quality and yield