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Click
here for a larger image.ÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊÊ
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Installation of a TMC high stiffness, highly
damped stainless steel
platform on STACIS®. (Photo courtesy of Texas
Instruments’ Kilby Center)
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STACIS® is the world's most advanced active vibration
cancellation system. Employing advanced inertial
vibration sensors and state-of-the-art piezoelectric actuators, STACIS® 2100
cancels vibration in real time by sensing floor vibration, then expanding
and contracting piezoelectric actuators to filter out floor motion.
Isolation starts at 0.6 Hz and the active bandwidth is 250 Hz.
Primarily designed to isolate precision microlithography,
metrology, and inspection equipment in
advanced semiconductor factories, STACIS® is now
the industry standard solution for the
most sensitive instruments in noisy environments.
Hundreds of times stiffer than air isolators,
STACIS® suffers from none of the limitations of
air systems. There is no "soft" suspension
and, unlike active air systems, STACIS® can
be "stacked" (placed beneath tool with an internal active
air isolation system). |
 Click here for a slide show
showing an installation of a TMC STACIS® 2100 System.
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The Nikon FX-21S LCD Stepper incorporates
an advanced version of TMC's STACIS® for the ultimate
in vibration control.The rigid mounts yield faster settling times
in response to motion, resulting in higher throughput.
click here for
a larger image
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Read the Application Note:
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In addition to facilitating optimal
tool performance and resolution in noisy fabs,
STACIS®
is guaranteed to meet the floor vibration specifications
of wafer inspection, metrology and microlithography
tools.*
With many hundreds of successful installations
worldwide, STACIS® is the ideal vibration isolation
system for the most vibration-sensitive instruments.
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Stacis¨
supporting the end chamber of a prototype
LIGO interferometer at the California Institute of Technology.
These are the most precise instruments ever
made-capable of measuring distances of less
than 10-18 meters.
Click here for a larger image.
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STACIS® isolating
a Varian NMR Spectrometer
click
here for a larger image |
| Provides greater
than 90% isolation at frequencies greater than 2 Hz, vertical
and horizontal |
Reduces
fab floor construction costs,
allows tools to be installed
in higher vibration environments |
| Active bandwidth, 0.6 Hz to 250
Hz |
Recommended by many tool manufacturers |
| 6 degrees-of-freedom
active hard mount design,no soft air suspension |
Installs easily, robust control
system requires minimal or no on-site compensation |
| A point-of-use-solution that is
compatible with all internal tool vibration isolation systems |
Ensures tool vibration criteria
will be met as fab vibration levels increase over time |
| Uses TMC’s patented
STACIS® 2100 technology to cancel vibration using
piezoelectric actuators |
Enables older and noisier floors
to accommodate state-of-the-art tools |
| Compatible with various floor
heights and sub-floor geometries |
Increases
throughput, quality and yield
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(may
vary depending upon configuration) |
| DC-2000 Digital
Controller Specifications |
| Analog inputs/outputs |
ÊÊÊ16 channels
(16/14 bit) |
| Digital inputs/outputs |
ÊÊÊ16 each |
| Sampling rate |
ÊÊÊ6.5 KHz nominal |
| Front
panel |
ÊÊÊTwo-line LCD with soft menu
keys |
| ÊÊÊBNC input
and output for signal monitoring |
| ÊÊÊTwo RS-232 communication
ports (second port on rear) |
| ÊÊÊTri-color system status
lamp |
| Physical |
ÊÊÊSingle RETMA rack unit
height x 15 in. deep |
| Power |
ÊÊÊ90-240 VAC, 50-60 Hz,
600w. max. |
| Other |
ÊÊÊPower connector for support
of external devices |
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| Performance
Specifications |
| Active degrees-of-freedom |
6 |
| Active bandwidth |
0.6 to 250 Hz |
| Natural Frequency: |
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| Passive
elastomer: |
18 Hz |
Effective
acitve
Ê resonant frequency |
0.5 Hz |
| Transmissibility
at resonance |
< 1.1 |
| Isolation above
2.0 Hz: |
> 90% |
Setting time after
a 10 lb.
(4.5 kg) step input
(10:1 reduction) |
0.3 second |
| Internal noise |
< 0.1nm RMS |
| Operating load range
per isolator (different passive
mounts required) |
400 - 4500 lb.
(182 - 2045 kg) |
| Isolator
overload safety factor |
> 2:1 |
| Number of isolators |
3 or 4 |
| Maximum displacement |
590 µ inches
(15 µm) |
Stiffness (1000
lbs./454 kg mass) (typical middle
capacity isolator) |
40,000 lbs./in
(73 x 103 N/m) |
| Magnetic field emitted |
< 0.02 micro-gauss
broadband RMS |
Dimensions,
Environmental
and Utility Requirements |
| Isolator
size |
11.75 in. w x 12.5
in. d x 10.8 in. h (300 x 320 x 275 mm) |
| Isolator
weight |
75 lb. (34 kg) |
| Controller
size |
13 in. w x 17 in.
d x 1.75 in. h (330 x 431 X 44 mm) |
| Temp.
operating |
50° to
+90° F (10 to 32° C) |
| Temp.
storage |
-40° to
255° F(-40 to 125° C) |
| Humidity,
operating |
68° F dewpoint
(maximum) |
| Power
required |
100, 120, 230,
or 240 volts;
50/60 Hz; < 600
watts,
CE compliant |
| Floor
displacement |
<500 µ in.
(13 µm) below 15 Hz |
Options
- TMC laminated, stainless steel platforms
- Frames and Risers
- Leveling Devices
- Earthquake Restraints
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