PEPS II – Features
May 17, 2012
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PEPS II product page
PEPS
®
II – Features
Digital control, user-friendly LCD interface
Non-contacting electro-pneumatic height control for Gimbal Piston™, CSP®, and MaxDamp® vibration isolation systems
Z-axis position repeatability: 10 microns
Improved vibration isolation due to the elimination of the lever contact of conventional mechanical height control systems
Pneumatic feedforward function minimizes Z-axis reaction to X-Y stage motion
May be tuned to rapidly settle motion induced by X-Y stages
Optional “VX” feature incorporates inertial sensors for active damping of vertical isolator resonance
“Soft-dock” compatible. Allows for wafer loading/unloading without kinematic mounting
Proportional electronic valves. No pulse noise introduced by “on-off” or conventional electronic valves
Plumbed exhaust line for clean disposal of waste air
Logic dock control and status
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