U. S. Patent No. 5,832,806 |
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Digital control, user-friendly LCD interface |
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Non-contacting electro-pneumatic height control for Gimbal Piston™, CSP®, and MaxDamp® vibration isolation systems |
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Z-axis position repeatability: 10 microns |
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Improved vibration isolation due to the elimination of the lever contact of conventional mechanical height control systems |
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Pneumatic feedforward function minimizes Z-axis reaction to X-Y stage motion |
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May be tuned to rapidly settle motion induced by X-Y stages |
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Optional “VX” feature incorporates inertial sensors for active damping of vertical isolator resonance |
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“Soft-dock” compatible. Allows for wafer loading/unloading without kinematic mounting |
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Proportional electronic valves. No pulse noise introduced by “on-off” or conventional electronic valves |
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Plumbed exhaust line for clean disposal of waste air |
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Logic dock control and status |
PEPS® II improves and builds upon TMC’s patented PEPS® (Precision Electronic Positioning System). With the addition of a new digital controller, PEPS® II is easier to use, offers more features, and has an improved user interface. PEPS® II is a digital non-contacting, height control system for TMC pneumatic vibration isolation systems. Such systems normally incorporate mechanical height valves and a mechanical height sensing linkage. Its applications range from semiconductor manufacturing equipment to improve settling time and increase yields, to precision laboratory environments which demand the optimum noise performance and platform stability.
Vertical
Transmissibility
Adaptor bracket can be provided to mount the PEPS® II controller in a RETMA rack.
| Physical Dimensions |
PEPS® II Controller
1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D
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| Weights | PEPS® II Controller:
approximately 3.0 lb (1.2 kg) |
| Environmental (refer to EN 61010-1: 1993, EN 61010-1/A2: 1995) |
For indoor use only, up to an elevation
of 2,000 m (6560 ft.)
Maximum allowable temperature range: 5° C to 35° C Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C Tolerance in main supply voltage: 85 VAC - 240 VAC Over voltage category: 2 Pollution degree (IEC 664): 2 Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom |
| Power Requirements |
Power input voltage
range: 90-230 VAC
Input frequency range: 50-60 Hz |
| PEPS® II User Interface
(Front Panel) |
Power switch 4 menu buttons LCD display 20 x 2 characters 2 diagnostic sockets (BNC-type) Three-color status LED USB port |
| PEPS® II Interface (Rear Panel) |
AC power entry with
EMI filter
1 air INPUT snap-in port for 1/4" O.D. tubing 1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing 4 air snap-in ports for 1/4" O.D. tubing (one per isolator) DB-25 male inputs-outputs and feedforward socket 1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors) 1 Phoenix 3.5 mm pitch 6 pins BLACK header (horizontal proximity sensors) Grounding threaded stud (#10-32 thread) DB-25 F socket: 1x digital Input, 3x geophone sensors interface (“-VX” option) DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional) |
| PEPS® II Performance Specifications |
Analog inputs (unipolar):
8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale Analog inputs (feedforward): 5 x 12 bit (16 bit using over sampling), ±9 V full scale Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping Analog input (feedforward) protection: ±15 Volts clipping Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale Analog output protection: indefinite short circuit protection, +5 Volts clipping Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping) Digital output rating: 0…+3.3 V, 20 mA max. Digital I/O protection: +5 Volts, -0.5 Volts clipping External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max) Communication port: USB, appears as RS-232 on PC Processor: ARM7TDMI / 41.78 MHz Control loop rate: 100 Hz - 2.0 KHz Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current NAMUR 0-20 mA output Velocity sensors - geophones (“-VX” option): 3x vertical, current output |
| Pneumatic Specifications |
Long-term height stability: ±50
microns Long-term tilt stability: ±50 micro radians Servo valves: 4 x 2-way variable-orifice proportional servo valves Valving technique: pure class-A Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa Nominal air consumption: 60 slpm (2 scfm) Air requirements: clean, dry air, filtered to 20 microns or better Fail safe: isolators deflate on power failure or power off Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose |
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