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Click here for a larger image
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U.S. Patent
No. 5,832,806
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| General Specifications |
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Power Supply: |
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100,120,230, 240VAC, or
 15VDC
(7 W nom. 12 W max.) |
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Leveling Accuracy: |
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5-10 micron (height,
typ.) |
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5-10 microradian
(Pitch and roll, typ.) |
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Leveling Hysteresis: |
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<5 microns/microradians
(integrators on, typ.) <50 microns/microradians
(integrators off, typ.) |
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Air Consumption: |
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0.0375 scfm per psig of
isolator pressure approx. (dry, clean
air, filtered to 20 µm or
better) |
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Physical Dimensions: |
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6.5" (h) x 4.1 25" (w)
x 7.5" (d) (165mm (h) x 104 mm (w) x 190 mm (d)) |
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Weight (unit alone): |
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5 Lb. (2.3 Kg) |
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Proximity Sensors: |
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M-30 NAMUR eddy-current
sensors (15mm operating height)
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| User Interface
Includes |
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Controls: |
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Height, pitch and
roll gain controls. "Level OK" range adjustment "Range
OK" and integrator status indication lamps. Simple Dip-switch
control over damping and integration
modes. Simple voltage selection for
operation in most countries. Quick disconnects for all power,
air, sensor, and I/O plugs |
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DB-25 Connectors: |
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Height, Pitch and
roll analog outputs and feed-forward inputs. Open-collector "status
OK" logic output. Optional external power supply inputs. |
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System Includes: |
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PEPS® main
control unit, proximity sensors,120VAC power cord. Flexible polyurethane
tubing and fittings. Air pressure regulator/filter combination.
Comprehensive operating manual. DB-25 male connector with shell.
All required tools. |
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PEPS® (Precision
Electronic Positioning System) is a non-contacting, analog height
control system for TMC pneumatic vibration isolation systems. Such
systems normally incorporate mechanical height valves and a mechanical
height sensing linkage. Its applications range from semiconductor
manufacturing equipment to improve settling time and increase yields,
to precision laboratory environments which demand the optimum noise
performance and platform stability.
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TMC’s active systems are ideal for
applications with motorized stages
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| Features |
- 10 micron/micro-radian height and tilt stability
and repeatability. With the switchable integrators on, this repeatability
becomes completely independent of the platform’s loading
or load distribution.
- Non-contacting sensors improve the vibration
isolation performance of the system (compared with conventional
mechanical valves).
- Improved damping over conventional mechanical
valving systems (when used with TMC isolators).
- Full analog feedforward inputs allows PEPS
to make needed pressure corrections
for payload shift before the platform
can deflect, minimizing settling times. The result is higher throughputs
for applications such as semiconductor inspection tools.
- Feedforward inputs also allow simplified docking
of stages in inspection machines and allow for electronic control
of a platform’s alignment with other equipment or tables.
- A true analog/proportional valving system
eliminates
"pulse noise" introduced on the payload by other PWM
(pulse-width modulated) systems.
- An adjustable logic output provides a “status
OK” signal for wafer loaders or other position-sensitive
applications.
- “Smart” turn-on mode reduces “hunt
and seek” of the platform when the system is “cold” started.
- The controller provides fully buffered analog
outputs indicating the platform’s height, pitch, and roll.
- A compact package measuring only 6.5(h) x
4.125(w) x 7.25(d) inches (including power supply).
- Simple design – there are only three
gain controls to be set for normal operation. Controller modes
are selected using a simple DIP switch, and all input/output functions
are accessible through a single DB-25 connector. Once configured,
it has a one-switch operation.
- All controls and access are on one side of
the package.
- PEPS can be powered remotely for ease of integration
into OEM applications.
- Compatible with a variety of height sensors
to meet different space requirements
- Air flow is valved off when the unit is either
switched off or unplugged, preventing isolator over-inflation.
- A plumbed exhaust line for clean disposal
of waste air.
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