Technical Manufacturing Corporation TMC
Pneumatic Isolators for OEM Applications
July 30, 2010
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MaxDamp® 
Vibration Isolation System
 



U.S. Patent No. 5,918,862
 Benefits
  • Faster payload settling times.
  • Faster throughput and
    higher yields for LCD and semiconductor manufacturing
    and inspection tools.
  • “Stiffer” feel to isolated surface
    while maintaining high vibration isolation performance.
  • Less vibration induced by
    air currents and acoustic
    noise as well as “on-board”
    generated forces.

MaxDamp large capacitySee a larger image.

MaxDamp Vibration Isolation System

See a larger image.     

MaxDamp® is a highly damped version of our Gimbal Piston™ Air Isolator. MaxDamp® is ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage-induced motion of the isolated payload in a low cost, passive system.

  Vibration isolation transfer function
 (vertical and  horizontal) of MaxDamp
         
MaxDampChart    
s    

Mount vs. Attenuation
0.1
0.01
0.001
Standard Mount (twist)
1.8
3.7
5.5
Standard Mount (xyz)
1.1
2.2
3.3
TMC MaxDamp Mounts
   (xyz,twist)
0.4
0.7
1.1

Comparison of settling times in seconds:
(isolator/DOF vs. attenuation from initial acceleration.)


   

 

 


 

 

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