MaxDamp® Active Vibration Cancellation System - Pneumatic Isolators for OEM Applications

Pneumatic Isolators for OEM Applications

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MaxDamp^®
Vibration Isolation System

U.S. Patent No. 5,918,862

Benefits

Faster payload settling times.
Faster throughput and
higher yields for LCD and semiconductor manufacturing
and inspection tools.
“Stiffer” feel to isolated surface
while maintaining high vibration isolation performance.
Less vibration induced by
air currents and acoustic
noise as well as “on-board”
generated forces.

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MaxDamp Vibration Isolation System

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MaxDamp^® is a highly damped version of our Gimbal Piston™ Air Isolator. MaxDamp^® is ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage-induced motion of the isolated payload in a low cost, passive system.

Vibration isolation transfer function
(vertical and horizontal) of MaxDamp

Mount vs. Attenuation	0.1	0.01	0.001
Standard Mount (twist)	1.8	3.7	5.5
Standard Mount (xyz)	1.1	2.2	3.3
TMC MaxDamp Mounts (xyz,twist)	0.4	0.7	1.1

Comparison of settling times in seconds:
(isolator/DOF vs. attenuation from initial acceleration.)