TMC MaxDamp® Vibration Isolation System

Pneumatic Isolators
for OEM Applications

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MaxDamp^®Vibration Isolation System

MaxDamp Vibration Isolation System
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MaxDamp^®, a highly damped version of our Gimbal Piston™ Air Isolator. MaxDamp^® is ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage induced motion of the isolated payload..

U.S. Patent No. 5,918,862

Benefits

Faster payload settling times.
Faster throughput and higher yields for LCD and semiconductor manufacturing/inspection tools.
“Stiffer” feel to isolated surface while maintaining high vibration isolation performance.
Less vibration induced by air currents and acoustic noise as well as “on-board” generated forces.

Vibration isolation transfer function
(vertical and horizontal) of MaxDamp^¨

Mount vs. Attenuation	0.1	0.01	0.001
Standard Mount (twist)	1.8	3.7	5.5
Standard Mount (xyz)	1.1	2.2	3.3
TMC MaxDamp Mounts (xyz,twist)	0.4	0.7	1.1

Comparison of settling times in seconds:
(isolator/DOF vs. attenuation from initial acceleration.)