ÊElectro-Damp¨ Active Vibration
ÊCancellation System
   
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SPACER
May 17, 2008
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Electro-Damp® PZT
Frame-Mountable Active Hard-Mount
With Extended Stroke
    
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Electro-Damp PZT

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Incorporating Patented Stacis¨ Technology
New from TMC!

General Specifications

 

Cost-effectively combines the best aspects of Stacis¨active hard-mount         
and Electro-Damp¨active air-mount vibration isolation systems.          

Stacis<sup>®</sup>

Stacis¨

Stacis®, first introduced in 1996, is the world's most advanced active vibration cancellation system. An active hard-mount, Stacisachieves extremely efficient vibration isolation using piezoelectric actuators and a stiff suspension. Electro-Damp®, first introduced nearly 20 years ago, was the first active, inertially damped, pneumatic vibration isolator. Electro-Damp® PZT combines the best features of these two technologies to provide a cost-effective, frame-mountable, stiff, yet extremely efficient, non-pneumatic vibration isolation system.
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sElectroDamp II





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ÊÊÊ ÊElectro-Damp® II
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Features & Benefits
 Electro-Damp¨ PZT
  • Incorporates patented Stacis® technology
  • Extended stroke piezoelectric actuators, up to 60 µm
  • Position repeatability of payload to within 20 µm
  • Frame-mountable design
  • 3 or 6 active degrees-of-freedom
  • Installs easily, no feedforward required
  • Active inertial vibration cancellation system
  • Fast settling time in response to stage motion
  • No soft air suspension
  • Simple, robust, and cost-effective
Transmissiblity
Electro-Damp PZT Chart
Click for larger view
General Specifications (may vary depending on configuration)
Power Amplifier  
Channels 8, 10A max peak
Êcurrent/channel
Type PWM with RF output filtering
Power 700 W (total, all channels)
Cooling Forced air
Protection Manual circuit breaker
Operation Remote or manual enable
Dimensions 2 RETMA rack unit
height x 15 in. deep
(1DC 2000, 1 Power Amplifier)
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Electro-Damp PZT DrawingÊÊÊÊÊÊÊÊÊÊClick for a larger imageÊÊ
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Dimensions may vary depending on load and configuration-
confirm with TMC


How to Order.
Contact a TMC Applications Engingeer for part numbers and pricing.
DC-2000 Digital Controller Performance Specifications
Analog inputs/outputs 16 channels
Ê(16/14 bit)
Digital inputs/outputs 16
Sampling rate 6.5 KHz nominal
Front panel Two-line LCD with soft
menu keys
BNC input and output
for signal monitoring
Two RS-232
communication ports
(second port on rear)
Tri-color system status lamp
Physical Single RETMA rack unit
height x 15 in. deep
Power 90-240 VAC, 50-60 Hz,
600 watts max.
Other Power connector for
support of external devices
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Active degrees of freedom 3 or 6
Active bandwidth 0.6 to 150 Hz
Natural frequency Passive elastomer:
15 Hz Vertically
5 Hz Horizontally
Effective active resonant
frequency: 0.5 Hz
Transmissibility at resonance < 1.1
Settling time after a 10 lb (4.5 kg)
Êstep input (10:1 reduction)
0.3 sec
Internal noise <0.1 nm RMS
Operating load range per isolator
Ê(different passive mounts required)
200 - 1,000 lb
(90 - 450 kg)
Isolator overload safety factor > 2:1
Number of isolators 3 or 4
Maximum displacement 2400 µ in. (60 µm)
Stiffness (1,000 lb/454 kg mass) 10,000 lb/in.
(18 x105 N/m)
Magnetic field emitted < 0.02 micro-gauss
broadband RMS
Dimensions, Environmental and Utility Requirements Linear Actuators (horizontal)
Isolator size 6.0 in. (w) x 7.31 in. (d) x 5.13 in. (h)
Ê(152.4 x 185.7 x 130.3mm)
Isolator weight 17 lb. (8kg)
Temp. operating 50¡ to +90¡ F (10¡ to 32¡ C)
Humidity operating 68¡ F dewpoint (maximum)
Power required 100, 120, 230, 240 volts;
50/60 Hz; < 200 watts, CE compliant
Floor displacement < 2400 µ in. (60 µm) below 15 Hz.

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PDF Click here to download a printable pdf

DC resistance 5.0 Ohms
Force constant 5 lb/Amp
Max. continuous force 10 lb
Peak force 30 lb
Electrical time const. 2.5 msec
 
 
 
 
 
 
 
 

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