• Six degrees-of-freedom active vibration damping system
• Non-contacting electronic height control
• Digital controller
• Feedforward inputs correct for stage-induced payload motions
• High-force electromagnetic actuators available separately or integrated
• Reduced payload motion and settling time for stage-induced motion
• Higher throughput, resolution and yield
• Modular design allows user ro specify a complete unit or components for ease of OEM integration
• Automatic tuning of feedforward parameters for reduced setup