CSP Compact Sub-Hertz Pendulum Vibration Isolation System
February 04, 2012
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Compact Sub-Hertz Pendulum Vibration Isolation System


U.S. Patent No. 5,779,010


Compact Sub-Hertz Pendulum
The Compact Sub-Hertz Pendulum Vibration Isolation System (CSP®) is a very low frequency horizontal vibration isolation system. Its uses include reducing the settling time of platforms subjected to horizontal (payload generated) impulses common to semiconductor manufacturing equipment.


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