Precision Vibration Isolation Systems
Docking Capabilities - Increasingly, tool builders incorporate the "soft
docking" capability of Electro-Damp®. That is, Electro-Damp maintains the payload in a very narrow window during
wafer exchange. However, some applications benefit from a conventional kinematic "hard dock."
TMCs AccuDock Precision Docking System allows extremely accurate docking of air-isolated payloads for the loading/off-loading of wafers in inspection/fabrication equipment. The isolated portion of the payload remains floating and isolated
until a TTL signal instructs the payload to dock. An adjustable volume of air is then vented from the isolators, gently
lowering the payload onto a set of kinematic mounts. Off-payload wafer handlers are then positioned to within ± 0.001 inch
in all degrees-of-freedom relative to the docked payload. After wafers are exchanged, the TTL signal can be switched, and the existing valving
system is re-enabled. The payload is refloated (isolated), and the process can resume.
Accudock™ shown attached to a TMC Gimbal Piston™ Isolator with mechanical self-leveling.