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July 04, 2008
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Docking Capabilities
Increasingly, tool builders incorporate the "soft docking" capability of Electro-Damp¨.
That is, Electro-Damp maintains the payload in a very narrow window during wafer exchange.
However, some applications benefit from a conventional kinematic "hard dock."

AccuDock™
Precision Kinematic Docking System

   
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TMC AccuDocké Precision Docking System
AccuDock™ Controller  and Crossed rolller-bearing kinematic mounts
AccuDocké Installation

AccuDock™ shown attached to
aTMC Gimbal Piston Isolator with mechanical self-leveling feet
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TMC’s AccuDock™ Precision Docking System allows extremely accurate docking of air-isolated payloads for the loading/off-loading of wafers in inspection/fabrication equipment. The isolated portion of the payload remains floating and isolated until a TTL signal instructs the payload to “dock.” An adjustable volume of air is then vented from the isolators, gently lowering the payload onto a set of kinematic mounts. Off-payload wafer handlers are then positioned to within ± 0.001 inch in all degrees-of-freedom relative to the docked payload. After wafers are exchanged, the TTL signal can be switched, and the existing valving system is re-enabled. The payload is refloated (isolated), and the process can resume.
   Features:
  • Payload docking time is typically one second (adjustable) with a comparable refloat time.
  • Precision roller bearings form a true kinematic six-point-contact mount and allow highly reproducible docking of the payload (typical repeatability is 7 0.001 in.).
  • Docking is initiated with a TTL signal (logic 1 for dock, 0 for float). The input impedance is 1kΩ.
  • Docking force is adjusted by increasing or decreasing the system’s vent time. A harder dock allows for some stage motion after docking (shift in the payload’s mass distribution) but requires a longer vent time and refloat times. Lighter docking minimizes the system’s cycle time.
  • A fully plumbed air exhaust line allows for clean disposal of waste air.
  • The system requires only a 12 - 20 VDC power supply, and a single logic input (3 wires total). If two-wire operation is desired, the logic input can be tied to the positive power line. The electronic interface is through a four-pin Jones connector. The maximum power consumption is 3w (intermittent:only during “docked” mode).
  • System air consumption depends upon the vent time selected for the application. The controller itself requires only 70 - 120 psi for operating internal pilot valves.
  • The system is compatible with all TMC’s mechanical valving systems or Precision Electronic Positioning System (PEPS).
  • The system is retrofitable to all of TMC’s standard vibration isolation systems and can be customized for most other air isolation systems.
  • The system is modular, allowing simple replacement of the valving unit for service. All pneumatic and electronic inputs and outputs to the box are quick-connect types. All interfaces to the box are from one side, allowing easy installation in OEM applications.
 
 
 
 
 
 
 
 

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