TMC Technical Manufacturing Corporation

Electro-Damp^®

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Docking Capabilities
Increasingly, tool builders incorporate the "soft docking" capability of Electro-Damp^®.
That is, Electro-Damp maintains the payload in a very narrow window during wafer exchange.
However, some applications benefit from a conventional kinematic "hard dock."

AccuDock™
Precision Kinematic Docking System

AccuDock™ Controller and Crossed rolller-bearing kinematic mounts	AccuDock™ shown attached to aTMC Gimbal Piston Isolator with mechanical self-leveling feet

TMC’s AccuDock™ Precision Docking System allows extremely accurate docking of air-isolated payloads for the loading/off-loading of wafers in inspection/fabrication equipment. The isolated portion of the payload remains floating and isolated until a TTL signal instructs the payload to “dock.” An adjustable volume of air is then vented from the isolators, gently lowering the payload onto a set of kinematic mounts. Off-payload wafer handlers are then positioned to within ± 0.001 inch in all degrees-of-freedom relative to the docked payload. After wafers are exchanged, the TTL signal can be switched, and the existing valving system is re-enabled. The payload is refloated (isolated), and the process can resume.
Features:
Payload docking time is typically one second (adjustable) with a comparable refloat time. Precision roller bearings form a true kinematic six-point-contact mount and allow highly reproducible docking of the payload (typical repeatability is 7 0.001 in.). Docking is initiated with a TTL signal (logic 1 for dock, 0 for float). The input impedance is 1kΩ. Docking force is adjusted by increasing or decreasing the system’s vent time. A harder dock allows for some stage motion after docking (shift in the payload’s mass distribution) but requires a longer vent time and refloat times. Lighter docking minimizes the system’s cycle time. A fully plumbed air exhaust line allows for clean disposal of waste air. The system requires only a 12 - 20 VDC power supply, and a single logic input (3 wires total). If two-wire operation is desired, the logic input can be tied to the positive power line. The electronic interface is through a four-pin Jones connector. The maximum power consumption is 3w (intermittent:only during “docked” mode). System air consumption depends upon the vent time selected for the application. The controller itself requires only 70 - 120 psi for operating internal pilot valves. The system is compatible with all TMC’s mechanical valving systems or Precision Electronic Positioning System (PEPS). The system is retrofitable to all of TMC’s standard vibration isolation systems and can be customized for most other air isolation systems. The system is modular, allowing simple replacement of the valving unit for service. All pneumatic and electronic inputs and outputs to the box are quick-connect types. All interfaces to the box are from one side, allowing easy installation in OEM applications.