STACIS® 2100 employs advanced inertial vibration sensors and state-of-the-art piezoelectric actuators which cancel vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators filter out floor motion.Primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.
Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air systems. There is no “soft” suspension and, unlike active air systems, STACIS can be “stacked” (placed beneath a tool with an internal active air isolation system).
In addition to facilitating optimal tool performance and resolution in noisy fabs, STACIS is guaranteed to meet the floor vibration specifications of wafer inspection, metrology and microlithography tools*.
With many hundreds of successful installations worldwide, STACIS is the ideal vibration isolation system for the most vibration-sensitive instruments.
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