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STACIS® 2100
Active Piezoelectric Vibration Cancellation
Overview  I  Specs  I  Performance  I  App Notes  I  App Photos  I  Order  I  See Also
Active Piezoelectric Vibration Cancellation System

STACIS® 2100 employs advanced inertial vibration sensors and state-of-the-art piezoelectric actuators which cancel vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators filter out floor motion.

Primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.

Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air systems. There is no “soft” suspension and, unlike active air systems, STACIS can be “stacked” (placed beneath a tool with an internal active air isolation system).

In addition to facilitating optimal tool performance and resolution in noisy fabs, STACIS is guaranteed to meet the floor vibration specifications of wafer inspection, metrology and microlithography tools*.

With many hundreds of successful installations worldwide, STACIS is the ideal vibration isolation system for the most vibration-sensitive instruments.

*Guarantee is contingent on TMC’s comparison and review of the site floor vibration data against the tool floor vibration criteria and confirmation that the STACIS transfer function will provide the required isolation.

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Specifications
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Performance
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CleanBench Compliance Curves

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To Order
STACIS™ III Systems are engineered-to-order for your specific tool and floor condition.
Please contact our Active Products Application Engineering Team so that we may propose a suitable configuration for your application
See Also
Overview  I  Specs  I  Performance  I   App Notes  I  App Photos  I  Order  I  See Also
See Also CleanBench