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MaxDamp®
Vibration Isolation System
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Overview
MaxDamp® is a highly damped version of our Gimbal Piston™ Air Isolator. MaxDamp® is ideal for OEM equipment with motorized X-Y stages or robots which require high performance vibration isolation and aggressive settling time for stage-induced motion of the isolated payload in a low cost, passive system.

 

 

 



 

Vibration isolation transfer function
(Vertical and horizontal of Max Damp)

MaxDamp Sizes and Capacities




Features




Performance
U.S. Patent No. 5,918,862
MaxDamp Transmissibility Charts
MaxDamp Vertical and Horizontal Acceleration vs. Time Charts
Mount vs. Attenuation
0.1
0.01
0.001
Gimball Piston Mount (twist)
1.8
3.7
5.5
Gimbal Piston Mount (xyz)
1.1
2.2
3.3
TMC MaxDamp Mounts
(xyz,twist)
0.4
0.7
1.1

The above charts illustrate the motion induced on the payload for different types of external disturbances. Figure 2 describes the vibration transfer function for a Gimbal Piston mount vs. MaxDamp mounts. It shows more floor vibration being transferred to the payload. This, however, is often not the dominant noise source in semiconductor fabs. The aggressive air handling systems in cleanrooms can induce noise in the payload by causing pressure differentials across the area of the payload (i.e., acoustic coupling). At low frequencies, payload noise is generated by pressure differentials acting across the area of the pneumatic isolators themselves (since the pressure inside the isolators is fixed, changes in room pressure cause a net force on the pistons of the pneumatic mount). Figure 3 describes the motion of the platform for forces directly applied to the payload, such as those described above. These are often the dominant noise sources, and as Figure 3 illustrates, the MaxDamp mount moves considerably less in these situations. The actual performance of the system will be somewhere between these two limiting cases.
MaxDamp Motion Forces Graphs
Comparison of settling times in seconds (isolator/DOF vs. attentuation from initial acceleration)




How to Order
Contact TMC
An application engineer will configure a system for your unique requirements and provide a quotation.
           
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