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MaxDamp®
Vibration Isolation System




Overview
TMC's industry standard Gimbal Piston™ Air Vibration Isolators provide excellent vibration isolation with damping of payload disturbances. But for some applications more aggressive damping of the payload is required.

MaxDamp® provides this additional damping for such applications combining Gimbal Piston Air Vibration Isolators with internal, tamper-proof viscous damping.

While not providing the aggressive, highest damping of our UltraDamp series, MaxDamp is an excellent choice when high damping is required with only a modest compromise in vibration attenuation performance.

MaxDamp is recommended for payloads with high force, high velocity XY motorized stages requiring fast settling time of the payload.

Ideal for Semiconductor Inspection and Lithography Tools and other instruments with relatively high force motorized stages

Compare damping levels between Gimbal Piston™, MaxDamp®, and UltraDamp™

MaxDamp Sizes and Capacities




The MaxDamp Advantage
Combines the advantages of self-leveling Gimbal Piston™ Air Isolators with high damping

Ideal for payloads with robotic motion or motorized stages which require both vibration isolation and aggressive settling of payload induced motion

Faster tool throughput and higher yields

Horizontal and vertical vibration isolation starting at 3 Hz

Minimal amplification
of resonance (8-12 dB)

Modular design. Upgradable to Electro-Damp® Active Vibration Cancellation




Features




Performance
MaxDamp Transmissibility Charts
MaxDamp Vertical and Horizontal Acceleration vs. Time Charts




How to Order
Contact TMC
Many TMC isolators are available with the UltraDamp™ damping level.
           
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