SEMICON West Exhibitor
San Francisco Booth # 6383
San Jose Booth # 11346

Expanded product line offers the most comprehensive line of vibration isolation systems available to the semiconductor industry

TMC's Electro-Damp II is a complete redesign of the original Electro-Damp® system, the first commercial, active vibration isolation system specifically designed to increase throughput, resolution and yield in semiconductor manufacturing applications. Electro-Damp II adds modularity, digital control, feed-forward, high-force and high-clearance actuators, as well as multiple digital user interfaces specifically designed for use in OEM applications such as steppers and metrology tools.

"Electro-Damp® II's feed-forward approach provides the ideal soft response to floor noise and stiff response to stage forces," said Steve Ryan, vice president of marketing, Technical Manufacturing Corporation. "This ensures excellent vibration isolation while providing very fast settling time of the isolated surface in response to stage-induced motion."

Electro-Damp® II's modularity allows the system to be used with servo valves alone for heavy, low-acceleration applications like CMMs; with electromagnetic actuation only for lighter stages which use high rates of acceleration; or a combination of both for the most demanding applications.

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TMC INTRODUCES ELECTRO-DAMP^® II AND FASTDOCK™

Electro-Damp® II Features and Benefits

• Six degree-of-freedom active vibration damping system
• Non-contacting electronic height control
• Feed-forward inputs correct for stage-induced payload motions
• High force (1001bf) electromagnetic actuators available separately or integrated
• Reduced payload motion and settling time for stage-induced motion
• Modular design allows user to specify a complete unit or components
• Automatic tuning of feed-forward parameters for reduced setup
• Remote servicing via telephone modem interface

TMC's new FastDock™ Precision Docking System is designed for Metrology tools and Steppers requiring position repeatability for loading and unloading wafers. FastDock™ employs true Kinematic mounting using roller-bearing mounts to assure long-term, clean, precision position repeatability to within +/- 100 microns.

"FastDock™ is designed specifically for high throughput applications and provides the fastest docking time possible consistent with safe handling of the isolated surface," Ryan said, explaining, "this is accomplished with high-force air cylinders and a unique four-stage docking sequence."

FastDock™ Features and Benefits

• Eliminates need for custom-engineered docking system
• Kinematic mounting for precision repeatability of docking position
• Higher tool throughput
• Modular design allows user to specify complete system or components
• Payload docking time less than one second with comparable refloat time (adjustable)
• System has all components required to retro-fit isolation systems, including mounting hardware, air tubing, fittings and detailed instruction manual

Electro-Damp® II and FastDock™ join TMC's family of systems specifically designed to control vibration for a complete range of semiconductor environments and applications. The Company designs and manufactures sophisticated vibration isolation and control products for precision processes around the world, such as semiconductor manufacturing, microbiology, optics, metrology and numerous academic, industrial and military research projects.

TMC's industry-standard product line includes state-of-the-art active isolators; breadboards; high performance optical and laboratory tables; OEM isolator designs and Quiet Islandfloor, sub-floor and table-top platforms which incorporate either STACIS® Rigid Stands, or Gimbal PistonÈ pneumatic supports. Standard and custom configurations plus a broad array of accessories are available

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Electro-Damp® II, FastDock™, STACIS®, Quiet Island® and Gimbal Piston® are trademarks of Technical Manufacturing Corporation.

For additional information on TMC's vibration isolation products, contact:

Steve Ryan,
Technical Manufacturing Corporation,
15 Centennial Drive, Peabody, MA 01960
978-532-6330; 800-542-9725; fax: 978-531-868;
E-mail: sales@techmfg.com