Peabody, Massachusetts, February 17, 2001 - Technical Manufacturing Corporation's new STACIS® 3000 incorporates innovative technology which significantly enhances stepper and other critical process tool productivity and yield. An active piezoelectric vibration control system, STACIS uses passive vibration isolation to virtually cancel vibration across a broad frequency range. STACIS can be configured either for OEM integration or as a point-of-use vibration isolation system.

STACIS is a six degree-of-freedom system with a settling time of 0.2 seconds for 10:1 reduction of stage-induced motion. The system provides 90% vibration isolation at 2Hz, and is 400 times stiffer than a pneumatic isolator.

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Technical Manufacturing Corporation, 15 Centennial Dr., Peabody, MA 01960
Phone: 800-542-9725 • 978-532-6330; Fax: 978-531-8682
Email: sales@techmfg.com • Web: www.techmfg.com

Contact:

Steve Ryan
TMC Vice President, Marketing
978-532-6330
email: sryan@techmfg.com