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TMC has continually expanded its STACIS product line to solve specific vibration problems caused by ambient building floor vibrations present in semiconductor manufacturing and other precision processes. In addition to the industry-standard STACIS¨ 2100, recent introductions to the STACIS product family include the STACIS¨ SEM-Baseª floor platform for scanning electron microscopes (SEMs) and STACIS¨ iX Stage-Baseª frame-mountable, extended stroke active piezoelectric vibration cancellation system.
ÒSTACIS SEM-Base is a compact, cost-effective alternative to our patented STACIS¨ active vibration cancellation,Ó said Steve Ryan, TMC vice president, marketing. ÒIt incorporates STACIS technology but has a much smaller footprint and installs easily with minimal tuning. Simply put the SEM on the platform, power up, and youÕre done.Ó
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STACIS¨ iX Stage-Baseª is designed to be integrated into advanced, high-throughput lithography and metrology tools. The STACIS technology is capable of extremely fast settling of the isolated payload in response to motorized, stage-induced motion, resulting in increased tool throughput.
STACIS Stage-Base provides vibration isolation comparable to TMCÕs STACIS 2100 but is specifically designed to be the primary isolation system incorporated inside the tool.
TMC designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. The ISO 9001:2008-certified companyÕs products include active and passive vibration isolation systems, optical table systems, and breadboards; laboratory tables and table top platforms; floor platforms; magnetic cancellation and electric field shielding systems; and acoustic enclosures. See the TMC STACIS Portal for more information.
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STACIS is a registered trademark and SEM-Base and Stage-Base are trademarks of Technical Manufacturing Corporation.
Contact:
Steve Ryan
Technical Manufacturing Corp.
978-532-6330
sryan@techmfg.com
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