STACIS®
Blending Precision Floor Vibration Control with A Commitment to Manufacturing
Primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.
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STACIS® 2100 Active Piezoelectric Vibration Cancellation System |
Quiet Island® Sub-Floor Platforms and Supports |
65 SERIES Floor Platform with STACIS® |
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