
Floor
and sub-floor platforms are modular solutions to the problem
of
supporting vibration-sensitive, large, floor-mounted equipment
or
semiconductor equipment in a raised-floor, cleanroom environment.
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STACIS® iX SEM-Base™Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes |
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65 SERIES Floor Platform with Gimbal Piston™ |
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