Floor
and sub-floor platforms are modular solutions to the problem
of
supporting vibration-sensitive, large, floor-mounted equipment
or
semiconductor equipment in a raised-floor, cleanroom environment.
|
 |
 
|
|
| STACIS® iX SEM-Base™ Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes |
|||
  |
|||
| 65 SERIES Floor Platform with Gimbal Piston™ |
|||
|
|
|||
65 SERIES