Floor and sub-floor platforms are modular solutions to the problem
of supporting vibration-sensitive, large floor-mounted equipment
or semiconductor equipmentent in a raised-floor, cleanroom environment.

			Rigid-Damped Tripod
Quiet Island® Rigid Platform	STACIS® iX SEM-Base™ Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes
65 SERIES  Floor Platform with STACIS®		65 SERIES Floor Platform with Gimbal Piston™
Product Index