ÊElectro-Damp¨ Active Vibration
Ê Cancellation System

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Electro-Damp
May 09, 2008
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spacerElectro-Damp¨ is the first commercial active vibration isolation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. It can be configured as individual modules, designed into a TMC-manufactured frame, or as part of a complex sub-system.

Electro-Damp Active Pneumatic Vibration Isolation System

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