Blending Precision Floor Vibration Control with A Commitment to Manufacturing
Electro-Damp Active Vibration Cancellation Systems
Electro-Damp® is the first commercial active vibration cancellation system designed specifically to increase throughput, resolution, and yield in semiconductor manufacturing applications. It can be configured as individual modules, designed into a TMC-manufactured frame, or as part of a complex sub-system.
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Electro-Damp® II Active Pneumatic Vibration Damping System |
PEPS® II Digital Precision Electronic Positioning System |
AccuDock™ Precision Kinematic Docking System |
