TMC's Electro-Damp¨ II the
first commercial active vibration isolation
system designed to increase throughput,
resolution, and yield in semiconductor
manufacturing applications has been completely
redesigned and updated. The new Electro-Damp¨
II is a versatile system that
adds modularity, digital control, feedforward,
high-force/high-clearance actuators
and multiple digital user interfaces
and can be configured for an extremely
wide range of OEM applications such
as microlithography, Inspection and
metrology tools.
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