Ultratech
Stepper, Inc. has chosen TMC’s
Electro-Damp® II Active
Vibration Control System as the
new platform for its 200 and 300
mm Saturn Spectrum and Titan Wafer
Stepper family.
“ We are extremely pleased to be partnered with Ultratech for their
vibration control and stage feedforward cancellation requirements,” said
Ulf Heide, President of TMC. “At TMC, we have been providing advanced
vibration control solutions to stepper companies for over 20 years. Over
that time, there has been an incredible growth in the needs of our customers
and the sophistication of our solutions.”
Ultratech
plans to incorporate Electro-Damp® II
into its steppers for semiconductor,
advanced packaging, microlithography,
nanotechnology, and optical networking
applications.
Each patented
Electro-Damp® II system will include
TMC’s DC-2000 digital controller,
non-contacting electronic valving system,
Gimbal Piston™ isolators, and high
force linear motors. The isolation system
will be incorporated into a highly engineered
frame, also made by TMC, which will be
the foundation of the tool.
“ We
are very pleased that our technology,
manufacturing capabilities, and products
are such a perfect match for Ultratech,” said
Steve Ryan, V.P., Marketing, of TMC. “Steppers
have consistently offered the greatest
challenge to precision vibration control
of any application we face.”
Electro-Damp® II
uses stage feedforward cancellation as
well as active feedback to provide the
low frequency vibration cancellation
and fast settling time of stage-induced
motion demanded by a state-of-the-art
stepper.
Ultratech
Saturn Spectrum 300e2
Photo courtesy of Ultratech Stepper, Inc.
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one-inch
or 25-mm grids (288 holes per foot2, 3,200
holes per m3); twice the number of honeycomb
cells (0.50 inch2) as our nearest competitor;
the hole pattern is 1/4-20 on one-inch
staggered centers or M6 on 25-mm staggered
centers; and the core density is unchanged – the
highest in the industry at 13.3 pounds
per foot3. The double-density pattern is
available with all TMC CleanTop II models.
