The new Electro-Damp PZT is a simple, robust, cost-effective system providing vibration isolation comparable to TMC's Stacis active piezoelectric vibration cancellation system.
Electro-Damp® PZT combines
the best features of TMCÕs STACIS¨ active hard-mount and its
Electro-Damp® active air mount systems. Stacis achieves extremely
efficient vibration isolation using piezoelectric actuators and a stiff
suspension. Electro-Damp is an active, inertially damped, pneumatic vibration
isolator. The new Electro-Damp PZT incorporates the best of both patented
technologies to provide a cost-effective, frame-mountable, stiff, yet
extremely efficient, non-pneumatic vibration isolation system for use
in microlithography, inspection, and metrology tools.
TMC continues to employ advancing technology to develop
new products that solve the challenging demands that semi-conductor tools
place on their vibration isolation systems.
TMC is the world’s leading manufacturer
of precision vibration isolation systems for low-amplitude building
floor vibration.
TMC has offered custom acoustic
enclosures for our equipment maker customers for many years.
These enclosures are highly engineered and uniquely suited to the
specific tool being isolated.
End-users, however, were placed in a position of having to design their
own acoustic enclosures for their unique applications. Given the level
of design involved, this was impractical. Demand arose for a standard, "off-the-shelf"
TMC enclosure incorporating many of the features of our custom enclosures
with the practicality of a single, multi-purpose design. The 83-500 Series
Acoustic Enclosure was designed as this multi-purpose acoustic enclosure.
83-500
Series Multi-Purpose Acoustic Enclosure shown
housing TableTop
PZT™ (left) and TableTop™ CSP® (right).
More Information about Stacis as a Microseismic Shaker...
Contact TMC or your local sales representative to acquire a STACIS® 2100 system for use as a shaker for testing your sensitive equipment in a controlled vibration environment.
Equipment manufacturers can use STACIS® to generate micronlevel floor vibration simulating real world floor activity to develop tool vibration criteria.
STACIS 2100® offers a completely unique and novel way to approach the development of tool vibration criteria. Stacis, which is normally operated as a floor vibration isolation/cancellation system, can also be operated to provide micron-level shaker input. This shaker signal can be white noise, discrete frequency, or a sine-swept wave-form. Stacis can provide independent or combined X, Y and Z axis vibration input. As a shaker, Stacis can be run to simultaneously cancel building floor vibrations providing a quiet foundation while superimposing on this the desired frequency and amplitude vibration spectrum required to test tool performance. No other shaker system can control inputs down to such small amplitudes. No other shaker system can isolate ambient floor vibration while simultaneously providing a controlled vibration frequency spectrum. The vibration generated at the Stacis digital controller at extremely low amplitudes is not corrupted by ambient building floor vibrations at the test site.
Complete working tools can be mounted on a Stacis isolation/shaker system, and the Stacis vibration amplitudes can be adjusted as overall tool performance is evaluated. The tool can be excited at given frequencies or given bands of frequencies to determine the exact amplitude/frequency relationship of vibration input that limits overall tool performance. The result is an overall tool vibration criteria level that corresponds to the exact vibration level at which the tool can provide optimal performance. This testing can be completed relatively quickly and easily – without shipping tools to customer sites and waiting for large amounts of field data or relying on questionable modeling information.
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